Abstract: A unit vector calculating unit of a laser machining device obtains a unit vector based on respective current rotational positions of an A-axis and a B-axis. A movement command calculating unit, a speed command calculating unit, or a torque command calculating unit generates a command signal for maintaining a gap amount at a constant value, based on the unit vector, and the gap amount between a machining nozzle and a workpiece. With a servo control unit, on the basis of the command signal, an X-axis motor, a Y-axis motor, and a Z-axis motor are controlled, whereby the machining nozzle is moved relatively in three-dimensional directions with respect to the workpiece.

Abstract: In a manufacturing method of a semiconductor device including a substrate having a front surface and a rear surface, and a film attached to the rear surface, the film is attached on the rear surface, a rear surface side groove is provided by half-cutting the substrate from the rear surface together with the film, a protective member is attached to the film after the rear surface side groove is provided, and a front surface side groove connected to the rear surface side groove is provided by dicing the substrate from the front surface after the protective member is attached.

Abstract: In a manufacturing method of a semiconductor device including a substrate having a front surface and a rear surface, and a film attached to the rear surface, the film is attached on the rear surface, a rear surface side groove is provided by half-cutting the substrate from the rear surface together with the film, a protective member is attached to the film after the rear surface side groove is provided, and a front surface side groove connected to the rear surface side groove is provided by dicing the substrate from the front surface after the protective member is attached.

Abstract: A unit vector calculating unit of a laser machining device obtains a unit vector based on respective current rotational positions of an A-axis and a B-axis. A movement command calculating unit, a speed command calculating unit, or a torque command calculating unit generates a command signal for maintaining a gap amount at a constant value, based on the unit vector, and the gap amount between a machining nozzle and a workpiece. With a servo control unit, on the basis of the command signal, an X-axis motor, a Y-axis motor, and a Z-axis motor are controlled, whereby the machining nozzle is moved relatively in three-dimensional directions with respect to the workpiece.

Abstract: A high frequency induction continuous heating method and a high frequency induction continuous heating apparatus are provided, and they can improve a working efficiency of a heating treatment and can also improve an uniformity of the heating treatment for an entirety of a work piece corresponding to multiple types of work pieces. In the high frequency induction continuous heating method in which a work piece (W) placed on a conveyance surface (2a) of a conveyor (2) is conveyed, and the work piece (W) on the conveyance surface (2a) is heated by high frequency induction heating coils (3) which are disposed at both ends of the conveyor (2) in a crosswise direction perpendicular to a conveyance direction (shown by an arrow (D) in the drawing), the work piece (W) is rotated around an axis which is extended so as to be perpendicular to the conveyance surface (2a), at a certain rotation angle (?) in mid-flow of the conveyance of the work piece (W) to change an orientation of the work piece (W).

Abstract: When an operation is performed in a direction (Z-axis direction) in which a machining head is brought closer to workpiece, a numerical controller that controls a laser beam machine avoids a collision of the machining head with the workpiece by switching to gap control when a gap sensor detects a gap amount between the machining head and the workpiece. At this point, whether to perform the operation to bring the machining head closer to the workpiece by gap control using a detection value of the gap sensor or by moving the machining head to a position determined by parameters can be selected using a mode switching unit.

Abstract: There is disclosed a filter inspection method which is excellent in sensitivity to detect defects of a filter and in operation efficiency. The filter inspection method includes a humidifying step of exposing a porous filter to moisture-containing air; and a detecting step of introducing water particles into the filter in a wet state through the humidifying step, to detect the water particles which pass through and flow out of the filter, thereby detecting defects of the filter.

Abstract: A high frequency induction continuous heating method and a high frequency induction continuous heating apparatus are provided, and they can improve a working efficiency of a heating treatment and can also improve an uniformity of the heating treatment for an entirety of a work piece corresponding to multiple types of work pieces. In the high frequency induction continuous heating method in which a work piece (W) placed on a conveyance surface (2a) of a conveyor (2) is conveyed, and the work piece (W) on the conveyance surface (2a) is heated by high frequency induction heating coils (3) which are disposed at both ends of the conveyor (2) in a crosswise direction perpendicular to a conveyance direction (shown by an arrow (D) in the drawing), the work piece (W) is rotated around an axis which is extended so as to be perpendicular to the conveyance surface (2a), at a certain rotation angle (A) in mid-flow of the conveyance of the work piece (W) to change an orientation of the work piece (W).

Abstract: A method of inspecting defects in an inspection target includes (1) a step of supplying a particle-containing gas to one end face of the inspection target under pressure, applying in parallel a first laser beam to the vicinity of the other end face of the inspection target, and photographing such end face from a position vertical to such end face, (2) a step of supplying a particle-containing gas to the one end face of the inspection target under pressure, applying in parallel a second laser beam to the vicinity of the other end face of the inspection target, and photographing such end face from a position vertical to such end face, and (3) a step of specifying defects in the inspection target from photographic results obtained by the steps (1) and (2).

Abstract: A manufacturing method for a semiconductor device includes: arranging a plurality of silicon substrates having a sacrifice layer in a reaction chamber in such a manner that surfaces of silicon substrates face each other; introducing an etching gas into the reaction chamber; reacting the etching gas and the sacrifice layer in each silicon substrate so that the sacrifice layer is dry-etched; and arranging a partition member in the reaction chamber to partition a predetermined range between adjacent silicon substrates. The partition member has a property in such a manner that a water molecule hardly penetrates the partition member. The water molecule is a reaction product between the etching gas and the sacrifice layer.

Abstract: There is disclosed a filter inspection method which is excellent in sensitivity to detect defects of a filter and in operation efficiency. The filter inspection method includes a humidifying step of exposing a porous filter to moisture-containing air; and a detecting step of introducing water particles into the filter in a wet state through the humidifying step, to detect the water particles which pass through and flow out of the filter, thereby detecting defects of the filter.

Abstract: A method of inspecting defects in an inspection target includes (1) a step of supplying a particle-containing gas to one end face of the inspection target under pressure, applying in parallel a first laser beam to the vicinity of the other end face of the inspection target, and photographing such end face from a position vertical to such end face, (2) a step of supplying a particle-containing gas to the one end face of the inspection target under pressure, applying in parallel a second laser beam to the vicinity of the other end face of the inspection target, and photographing such end face from a position vertical to such end face, and (3) a step of specifying defects in the inspection target from photographic results obtained by the steps (1) and (2).

Abstract: An inspection method for detecting a defect in a test object. A particulate is generated, then the generated particulate is introduced into a test object. Subsequently, light having high directivity is emitted such that the light passes in the vicinity of the test object to irradiate the particulate discharged from the test object, thereby making the particulate visible. An inspection apparatus for detecting a defect in a test object, including a particulate generator, a particulate introducing device which introduces the particulate into a test object, and a high directional light emitter emitting light passing in the vicinity of the test object and irradiating the particulate discharged from the test object to visualize the particulate. The inspection method and apparatus can detect a defect with high sensitivity and shorten an inspection time and a post-treatment time.

Abstract: An inspection method for detecting a defect in a test object. A particulate is generated, then the generated particulate is introduced into a test object. Subsequently, light having high directivity is emitted such that the light passes in the vicinity of the test object to irradiate the particulate discharged from the test object, thereby making the particulate visible. An inspection apparatus for detecting a defect in a test object, including a particulate generating means for generating a particulate, a particulate introducing means for introducing the particulate into a test object, and a light emitting means for emitting light with high directivity that passes in the vicinity of the test object and irradiates the particulate discharged from the test object thereby to visualize the particulate.