Abstract: A center beam which is formed out of a thin film constituted to be combined with a light reflection film provided on one surface of the center beam, which has both ends fixed and which is deformed by an electronic force; a substrate electrode which is opposed to the center beam through a gap formed on the other surface of the center beam; an opposed surface which is a surface of the substrate electrode opposed to the center beam modulating the incident light on the light reflection film, the opposed surface restricting deformation of the center beam due to application of a driving voltage to the substrate electrode by abutting on the center beam; and a substrate which has the substrate electrode having the opposed surface, formed in a concave section, and which holds a to-be-held section of the center beam, are provided.

Abstract: A center beam which is formed out of a thin film constituted to be combined with a light reflection film provided on one surface of the center beam, which has both ends fixed and which is deformed by an electronic force; a substrate electrode which is opposed to the center beam through a gap formed on the other surface of the center beam; an opposed surface which is a surface of the substrate electrode opposed to the center beam modulating the incident light on the light reflection film, the opposed surface restricting deformation of the center beam due to application of a driving voltage to the substrate electrode by abutting on the center beam; and a substrate which has the substrate electrode having the opposed surface, formed in a concave section, and which holds a to-be-held section of the center beam, are provided.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: A method for driving a light deflector the method includes turning over a direction of an electric field acting on the plate shape member, in an optional period. In the method, the light deflector deflects a beam incident on a light reflection area by displacing a plate shape member having the light reflection area with an electrostatic force. The light deflector includes a substrate, a plurality of control members, a fulcrum member, the plate shape member, and a plurality of electrodes.

Abstract: A miniaturized and highly integrated optical deflection apparatus is realized in which the number of electrodes for driving the optical deflection apparatus is reduced. The optical deflection apparatus implements a sheet member that is electrically floating and plural electrodes that are implemented on a substrate. The sheet member includes a member having a light reflection region and an electret member that is charged at a predetermined electric potential. The sheet member is tilted by applying an electric potential that is substantially equivalent to an electric potential of the electret member to one of the electrodes and applying a ground potential to another one of the electrodes.

Abstract: A first substrate is formed with a lens, a plurality of beams for supporting the lens, and a first electrode provided on the plurality of beams. A second substrate is formed with second electrodes at location opposed to the plurality of beams through gaps. A voltage control circuit applies voltage between the first electrodes formed on the plurality of beams and the second electrodes to apply the electrostatic force to the plurality of beams to generate bending, thereby changing a tilting direction of the lens.

Abstract: An optical scanning device includes optical modulation means having an one-dimensional optical modulator array wherein a plurality of optical modulators are arranged one-dimensionally; lighting means; and a scanning optical system for deflecting the beams modulated by the optical modulators in the one-dimensional optical modulator array in a direction perpendicular to the arrangement direction of the optical modulators. A plurality of the one-dimensional optical modulator arrays are arranged in a direction perpendicular to the arrangement direction of the optical modulators. The beams modulated by respective optical modulators of the one-dimensional optical modulator arrays can be irradiated on a pixel in piles.

Abstract: A first substrate is formed with a lens, a plurality of beams for supporting the lens, and a first electrode provided on the plurality of beams. A second substrate is formed with second electrodes at location opposed to the plurality of beams through gaps. A voltage control circuit applies voltage between the first electrodes formed on the plurality of beams and the second electrodes to apply the electrostatic force to the plurality of beams to generate bending, thereby changing a tilting direction of the lens.

Abstract: A first substrate is formed with a lens, a plurality of beams for supporting the lens, and a first electrode provided on the plurality of beams. A second substrate is formed with second electrodes at location opposed to the plurality of beams through gaps. A voltage control circuit applies voltage between the first electrodes formed on the plurality of beams and the second electrodes to apply the electrostatic force to the plurality of beams to generate bending, thereby changing a tilting direction of the lens.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: An ink jet head that can be easily connected to an external circuit is provided without an increase in the number of production procedures. Diaphragms and a diaphragm external electrode having the same thickness as the diaphragms are formed on a silicon substrate that is a first substrate located on the same plane as the diaphragms. The diaphragm external electrode is located within 2 &mgr;m from the individual external electrodes of a plurality of electrodes on a second substrate.

Abstract: A center beam which is formed out of a thin film constituted to be combined with a light reflection film provided on one surface of the center beam, which has both ends fixed and which is deformed by an electronic force; a substrate electrode which is opposed to the center beam through a gap formed on the other surface of the center beam; an opposed surface which is a surface of the substrate electrode opposed to the center beam modulating the incident light on the light reflection film, the opposed surface restricting deformation of the center beam due to application of a driving voltage to the substrate electrode by abutting on the center beam; and a substrate which has the substrate electrode having the opposed surface, formed in a concave section, and which holds a to-be-held section of the center beam, are provided.

Abstract: A first substrate is formed with a lens, a plurality of beams for supporting the lens, and a first electrode provided on the plurality of beams. A second substrate is formed with second electrodes at location opposed to the plurality of beams through gaps. A voltage control circuit applies voltage between the first electrodes formed on the plurality of beams and the second electrodes to apply the electrostatic force to the plurality of beams to generate bending, thereby changing a tilting direction of the lens.

Abstract: An electrostatic ink-jet head includes an oscillation plate which defines a bottom of a pressurizing chamber. An electrode substrate is bonded to the oscillation plate and includes a recessed portion that defines an internal space between the oscillation plate and the electrode substrate. A curved electrode is arranged on the recessed portion so as to face the oscillation plate via the internal space. When a driving voltage is applied to the electrode, the electrode actuates the oscillation plate via an electrostatic force, so as to pressurize ink in the pressurizing chamber, thereby ejecting an ink drop onto the recording paper.

Abstract: An ink jet head of the present invention compresses ink with an electrostatic force generated between each vibration plate and a counter electrode facing it. A glass substrate is formed with through holes in which a conductor is buried. A metal wiring pattern and conductor bumps are provided on the rear of each counter electrode. The conductor bumps and counter electrodes associated therewith are electrically connected together. Ink is fed from the rear of the glass substrate to a common ink chamber via a through hole assigned to ink feed. A metal wiring pattern on the rear of the glass substrate allows the conductor bumps to be arranged at any desired positions. The head does not need any flexible printed circuit board or any wiring substrate.

Abstract: An optical-pick-up device focuses a coherent light beam to form a spot on an optical recording medium, and performs recording/reproducing of information with respect to the optical recording medium. The optical-pick-up device includes a substrate and an objective lens which is provided on one side of the substrate and focuses the coherent light beam at an exposed surface situated on another side of the substrate.

Abstract: A micro metal-wiring construction comprises a substrate having a first insulating layer thereon, a metal wiring formed on the first insulating layer of the substrate, and a second insulating layer covering the metal wiring. The coefficient of thermal expansion of the metal wiring is greater than those of the first and the second insulating layers. Intersection lines formed between grain boundaries of the metal wiring and a surface of the first insulating layer is nearly perpendicular to an extending direction of the metal wiring and an angle between grain boundary planes and a line that is perpendicular to a surface of the first insulating layer is greater than 20 degrees. Metal-wiring having a good resistance against stress-induced-migration is obtained by providing when this angle is greater than 20.degree..

Abstract: An apparatus for zone melting a thin semiconductor film comprises an first laser for heating the thin semiconductor film, at least one additional laser for heating an insulating substrate, a first temperature detecting device for detecting the temperature of a melted portion of the thin semiconductor film, and a second temperature detecting device for detecting the temperature of a solidified portion of the thin semiconductor film. The apparatus further comprises a first controller for controlling an output of the first laser so as to maintain the temperature of the melted portion in a first predetermined temperature range, and a second controller for controlling an output of the additional laser so as to maintain the temperature of the solidified portion in a second predetermined temperature range.