Patents by Inventor Kouichi Tanoue

Kouichi Tanoue has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for scrubbing and cleaning substrate
    Patent number: 5518552
    Abstract: A substrate scrubbing and cleaning method in which a substrate is carried to a rotatable scrubbing arrangement, and both surfaces of the substrate are scrubbed by the rotatable scrubbing arrangement while the substrate is maintained substantially horizontal. In addition, a cleaning solution is applied to both surfaces of the substrate while the substrate is substantially horizontal and is linearly reciprocated.
    Type: Grant
    Filed: June 29, 1994
    Date of Patent: May 21, 1996
    Assignees: Tokyo Electron Limited, Tokyo Electron Kyushu Limited
    Inventors: Kouichi Tanoue, Shinzi Kitamura, Noriyuki Anai, Takami Satoh, Takayuki Tomoeda, Tatsuya Iwasaki, Kengo Mizosaki
  • Device and method for scrubbing and cleaning substrate
    Patent number: 5345639
    Abstract: A substrate scrubbing and cleaning device comprising a mechanism having an upper and a lower brush members for scrubbing both surfaces of an LCD glass substrate, a mechanism for rotating the upper and lower brush members, a mechanism for supplying pure water to the upper and lower brush members, a mechanism for carrying the substrate between the upper and the lower brush members to reciprocate it relative to the upper and lower brush members in a substrate carrying direction, and a controller for controlling the operation of the substrate carrying mechanism.
    Type: Grant
    Filed: May 28, 1993
    Date of Patent: September 13, 1994
    Assignees: Tokyo Electron Limited, Tokyo Electron Kyushu Limited
    Inventors: Kouichi Tanoue, Shinzi Kitamura, Noriyuki Anai, Takami Satoh, Takayuki Tomoeda, Tatsuya Iwasaki, Kengo Mizosaki