Abstract: This invention provides a substrate transport apparatus (100) which transports a substrate (W) placed on a hand portion (10) to a processing apparatus or a predetermined storage unit. The substrate transport apparatus (100) includes a moving means (20) for supporting the proximal side (10b) of the hand portion (10) serving as one end of the hand portion (10), and reciprocally moving the hand portion (10) in the direction of its extension, a tilt detection means (30) for detecting the tilt of a distal end (10a) of the hand portion (10) with respect to the horizontal direction, which accompanies flexure of the hand portion (10) upon placing the substrate (W) on the hand portion (10), and a tilt correction means (40) for generating a pitching motion of the hand portion (10) as a whole so as to cancel the tilt of the distal end (10a) of the hand portion (10).

Abstract: This invention provides a substrate transport apparatus (100) which transports a substrate (W) placed on a hand portion (10) to a processing apparatus or a predetermined storage unit. The substrate transport apparatus (100) includes a moving means (20) for supporting the proximal side (10b) of the hand portion (10) serving as one end of the hand portion (10), and reciprocally moving the hand portion (10) in the direction of its extension, a tilt detection means (30) for detecting the tilt of a distal end (10a) of the hand portion (10) with respect to the horizontal direction, which accompanies flexure of the hand portion (10) upon placing the substrate (W) on the hand portion (10), and a tilt correction means (40) for generating a pitching motion of the hand portion (10) as a whole so as to cancel the tilt of the distal end (10a) of the hand portion (10).

Abstract: A membrane apparatus includes a bubble supplying portion for supplying micro bubbles which is provided at a location in the vicinity of the entrance of a flow passage for raw liquid. Thus, the growth of a gel layer on a membrane surface can be prevented, and a large filtering amount can be maintained while preventing sludge from blocking the membrane. Moreover, since bubbles uniformly pass through the inter-membrane passages, sludge blocking can be evenly prevented over the entire surface of the membrane. When a flat membrane is used as the filtering membrane, there is provided an advantage of reducing the frequency of work for disassembling the frame and cleaning the membranes. A membrane treatment apparatus includes the membrane apparatus, an aeration apparatus, a circulating tank, and a filtrate pump.

Abstract: A pressure sensitive adhesive sheet comprising a substrate and an adhesive composition which is coated on the surface of the substrate. The main components of the adhesive composition are (a) a copolymer comprising monomeric units of an acrylic ester, (b) monomeric units of a polar acrylic compound, (c) monomeric units of a high glass transition temperature (Tg) macromonomer having a Tg of 20.degree. C. or above, (d) monomeric units of a low Tg macromonomer having a Tg of below 20.degree. C. and (e) monomeric units of an oligomer having telechelic thiol functional groups. The pressure sensitive adhesive sheet has excellent adhesive strength, resistance against formation of blisters and removability upon heating.