Patents by Inventor Kouji Nishino

Kouji Nishino has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10604840
    Abstract: To provide a liquid level indicator and a liquid raw material vaporization feeder, in which the time to detect a switch from the liquid phase to the gas phase has reduced flow rate dependence, and also the detection time can be shortened. The present invention includes a chamber 2 that stores a liquid raw material, at least one protection tube 3 housing a resistance temperature detector for detecting the liquid level L1 in the chamber 2, and a flow controller 4 that controls the flow rate of the gas flowing out from the chamber 2 and feeds the same. The protection tube 3 is horizontally inserted into a sidewall 2a of the chamber 2 and fixed thereto.
    Type: Grant
    Filed: November 2, 2015
    Date of Patent: March 31, 2020
    Assignee: FUJIKIN INCORPORATED
    Inventors: Atsushi Hidaka, Masaaki Nagase, Kaoru Hirata, Satoru Yamashita, Keiji Hirao, Kouji Nishino, Nobukazu Ikeda
  • Publication number: 20200088561
    Abstract: The liquid level meter according to the present invention includes a resistive temperature detector, a temperature measuring body located above it, a temperature detecting unit detecting temperatures of the resistive temperature detector and the temperature measuring body, a current controlling unit determining a current value to be flowed through the resistive temperature detector so that the resistive temperature detector and the temperature measuring body become a predetermined temperature difference, a power supply unit supplying the current of the determined current value to the resistive temperature detector, and a liquid level detecting unit detecting a position of a liquid level.
    Type: Application
    Filed: December 22, 2017
    Publication date: March 19, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Takatoshi NAKATANI, Satoru YAMASHITA, Katsuyuki SUGITA, Kaoru HIRATA, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: 10573801
    Abstract: A piezoelectric linear actuator comprising a laminated piezoelectric actuator having a cylindrical shape; a lower support member supporting the laminated piezoelectric actuator and extending laterally to the left and right of the laminated piezoelectric actuator; a pair of displacement transfer members extending along the left and right sides of the laminated piezoelectric actuator, respectively, to slidably intersect the lower support member and transferring displacement due to the piezoelectric effect of the laminated piezoelectric actuator; and an output part locked to the pair of displacement transfer members below the lower support member and coupling lower end portions of the displacement transfer members, wherein the pair of displacement transfer members are formed to have a width dimension that is the same or substantially the same as the width dimension of the laminated piezoelectric actuator.
    Type: Grant
    Filed: August 9, 2016
    Date of Patent: February 25, 2020
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kohei Shigyou, Takashi Hirose, Kouji Nishino, Ryousuke Dohi, Naofumi Yasumoto
  • Publication number: 20200033895
    Abstract: A pressure-type flow rate control device includes a restriction part; a control valve provided upstream of the restriction part; an upstream pressure sensor for detecting pressure between the restriction part and the control valve; and an arithmetic processing circuit connected to the control valve and the upstream pressor sensor. The device is configured to perform flow rate control by controlling the control valve according to an output of the upstream pressure sensor. The arithmetic processing circuit performs an operation of closing the control valve in order to reduce a flow rate of a fluid flowing through the restriction part, and performs an operation of closing the control valve by feedback control in which a target value is an exponential function more gradual than the pressure drop characteristic data when a gas flows out of the restriction part.
    Type: Application
    Filed: March 20, 2018
    Publication date: January 30, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Katsuyuki SUGITA, Kaoru HIRATA, Nobukazu IKEDA, Kouji NISHINO, Masahiko TAKIMOTO, Takahiro IMAI, Shinya OGAWA
  • Publication number: 20200018413
    Abstract: A piezoelectric-element-driven valve includes a valve seat provided on a flow path, a valving element detachably seated on the valve seat, and a piezoelectric element, and is configured to move the valve body by extension of the piezoelectric element. The piezoelectric-element-driven valve also is provided with a detection mechanism for detecting an extension amount of the piezoelectric element, the detection mechanism including a strain sensor, and being capable of detecting an movement amount of the valving element from an output of the strain sensor.
    Type: Application
    Filed: December 22, 2017
    Publication date: January 16, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Ryousuke DOHI, Kaoru HIRATA, Katsuyuki SUGITA, Koji KAWADA, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20200018736
    Abstract: A method for detecting the concentration of a specified gas contained in a mixed gas includes, in a pressure-type flow rate control device including a restriction portion, an upstream valve provided upstream of the restriction portion, and a pressure sensor for measuring the pressure between the restriction portion and the upstream valve, a step of flowing the mixed gas from the upstream side of the upstream valve in a state in which the pressure on the downstream side of the restriction portion is lower than the pressure on the upstream side of the restriction portion, a step of determining with a pressure sensor pressure drop characteristics occurring after the upstream valve is changed from an open to a closed state, and a step of determining the concentration of the specified gas in the mixed gas based on the pressure drop characteristics.
    Type: Application
    Filed: September 27, 2017
    Publication date: January 16, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masaaki NAGASE, Kenji AIKAWA, Kaoru HIRATA, Takahiro IMAI, Tetsuo NARITOMI, Tsutomu SHINOHARA, Takahiro MATSUDA, Kouji NISHINO
  • Patent number: 10534376
    Abstract: A gas divided flow supplying apparatus, including a control valve 3, a pressure type flow control unit 1a connected to a process gas inlet 11, a gas supply main pipe 8 connected to the downstream side of control valve 3, a plurality of branched pipe passages 9a, 9n connected in parallel to the downstream side of main pipe 8, opening and closing valves 10a, 10n interposed in the respective branched pipe passages 9a, 9n, orifices 6a, 6n provided on the downstream sides of valves 10a, 10n, a temperature sensor 4 provided near the process gas passage between the control valve 3 and the orifices 6a, 6n, a pressure sensor 5 provided in the process gas passage between the control valve 3 and the orifices 6a, 6n, divided gas flow outlets 11a, 11n provided on the outlet sides of the orifices 6a, 6n, and an arithmetic and control unit 7.
    Type: Grant
    Filed: April 1, 2013
    Date of Patent: January 14, 2020
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kouji Nishino, Ryousuke Dohi, Kaoru Hirata, Katsuyuki Sugita, Nobukazu Ikeda
  • Publication number: 20200011720
    Abstract: The flow rate measuring method is performed in a common gas supply system comprising a plurality of gas supply paths each having a first valve, and a gas measuring device formed downstream side of the plurality of gas supply paths, having a pressure sensor, a temperature sensor, and a downstream side second valve.
    Type: Application
    Filed: February 8, 2018
    Publication date: January 9, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masaaki NAGASE, Yohei SAWADA, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20190360887
    Abstract: A fluid controller is provided having a flow path through which a fluid can flow, a closed space separated from the flow path by an isolation member, and a leak port capable of communicating the closed space with an external part. An anomaly detection device for detecting an anomalty has a pressure sensor detachably fixed to the leak port, a pressure sensor for detecting the pressure in the closed space, a processing module for executing a predetermined information processing, and an detachable mechanism for blocking the leak port from the external part in the state of being fixed. The processing module determines an anomaly of the fluid controller by comparing a detection value detected by the pressure sensor to a predetermined threshold, and transmits a discrimination result of the anomaly of the fluid controller to a server.
    Type: Application
    Filed: February 6, 2018
    Publication date: November 28, 2019
    Applicant: Fujikin Incorporated
    Inventors: Akihiro Harada, Kouji Nishino, Ryousuke Doi, Kouji Kawada, Katsuyuki Sugita, Shinichi Ikeda, Michio Yamaji, Tsutomu Shinohara, Ryutaro Tanno, Yuto Kawauchi
  • Patent number: 10408742
    Abstract: To provide a concentration measurement method with which the concentrations of predetermined chemical components can be measured non-destructively, accurately, and rapidly by a simple means, up to the concentrations in trace amount ranges, as well as a concentration measurement method with which the concentrations of chemical components in a measurement target can be accurately and rapidly measured in real time up to the concentrations in nano-order trace amount ranges, and which is endowed with a versatility that can be realized in a variety of embodiments and modes. In the present invention, a measurement target is irradiated, in a time sharing manner, with light of a first wavelength and light of a second wavelength that have different optical absorption rates with respect to the measurement target. The light of each wavelength, arriving optically via the measurement target as a result of irradiation with the light of each wavelength, is received at a shared light-receiving sensor.
    Type: Grant
    Filed: November 20, 2015
    Date of Patent: September 10, 2019
    Assignees: FUJIKIN INCORPORATED, TOHOKU UNIVERSITY
    Inventors: Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda, Michio Yamaji, Shigetoshi Sugawa, Rihito Kuroda
  • Publication number: 20190271636
    Abstract: A concentration measuring device includes a measuring cell having a flow passage and a translucent window, a light source for emitting light to the measuring cell through the window, a reflective member for reflecting light propagating through the measuring cell to the window, a light detector for detecting the light exiting from the window, a calculation part for calculating the concentration of the fluid on the basis of a detection signal from the light detector, and an optical device for guiding the light from the light source to the window and guiding the light from the window to the light detector.
    Type: Application
    Filed: July 25, 2017
    Publication date: September 5, 2019
    Applicants: TOKUSHIMA UNIVERSITY, FUJIKIN INCORPORATED
    Inventors: Yoshihiro DEGUCHI, Takashi FUKAWA, Taiki HATTORI, Masaaki NAGASE, Kazuteru TANAKA, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: 10385998
    Abstract: Passage members each have a required width, a required height, and a required length, and are provided at middle portions in the width direction with fluid passages, respectively. As coupling means, two bolts are used. The middle portion in the width direction of each of the passage members has opposite end portions that are each provided with a female screw and a bolt insertion hole to be faced by the female screw, respectively. The upper bolt is inserted into one of the passage members and is screwed into the female screw of the other passage member. The lower bolt is inserted into the other passage member and is screwed into the female screw of the one of the passage members. The passage members are coupled with use of the two upper and lower bolts whereby a seal member is securely fixed.
    Type: Grant
    Filed: August 10, 2016
    Date of Patent: August 20, 2019
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kohei Shigyou, Takashi Hirose, Kouji Nishino, Ryousuke Dohi, Naofumi Yasumoto
  • Patent number: 10386863
    Abstract: A pressure-type flow controller includes a main body provided with a fluid channel between a fluid inlet and a fluid outlet and an exhaust channel between the fluid channel and an exhaust outlet; a pressure control valve fixed to the fluid inlet of the main body for opening/closing the upstream side of the fluid channel; a pressure sensor for detecting the internal pressure of the fluid channel on the downstream side of the pressure control valve; an orifice provided in the fluid channel on the downstream side of the point of branching of the exhaust channel; and an exhaust control valve for opening/closing the exhaust channel.
    Type: Grant
    Filed: October 15, 2014
    Date of Patent: August 20, 2019
    Assignee: FUIIKIN INCORPORATED
    Inventors: Kaoru Hirata, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Katsuyuki Sugita
  • Patent number: 10386861
    Abstract: A pressure type flow control system with flow monitoring includes an inlet, a control valve including a pressure flow control unit connected downstream of the inlet, a thermal flow sensor connected downstream of the control valve, an orifice installed on a fluid passage communicatively connected downstream of the thermal flow sensor, a temperature sensor provided near the fluid passage between the control valve and orifice, a pressure sensor provided for the fluid passage between the control valve and orifice, an outlet communicatively connected to the orifice, and a control unit including a pressure type flow rate arithmetic and control unit receiving a pressure signal from the pressure sensor and a temperature signal from the temperature sensor, and a flow sensor control unit to which a flow rate signal from the thermal flow sensor is input.
    Type: Grant
    Filed: March 6, 2017
    Date of Patent: August 20, 2019
    Assignee: Fujikin Incorporated
    Inventors: Kaoru Hirata, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda, Katsuyuki Sugita
  • Publication number: 20190250648
    Abstract: A pressure-type flow rate control device includes a control valve; a pressure sensor provided downstream of the control valve; an orifice-built-in valve provided downstream of the pressure sensor; and a control unit connected to the control valve and pressure sensor. The built-in orifice valve has a valve mechanism comprising a valve seat body and a valve element for opening/closing a flow path; a drive mechanism for driving the valve mechanism, and an orifice member provided in the vicinity of the valve mechanism. The pressure-type flow rate control device further includes an opening/closing-detection mechanism for detecting the open/closed state of the valve mechanism, the control unit being configured to receive a detection signal from the opening/closing-detection mechanism.
    Type: Application
    Filed: July 25, 2017
    Publication date: August 15, 2019
    Applicant: Fujikin Incorporated
    Inventors: Kaoru HIRATA, Katsuyuki SUGITA, Nobukazu IKEDA, Kouji NISHINO
  • Publication number: 20190243391
    Abstract: A fluid control device includes a main body block including a first flow passage, and a second flow passage, a first and second fluid control units installed on an installation surface of the main body block. The first and second flow passages include a first portion extending along a first direction and a second flow passage portion orthogonal to the first direction. The second portion is formed of a hole extending from a side surface of the main body block and a sealing member.
    Type: Application
    Filed: October 12, 2017
    Publication date: August 8, 2019
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kaoru HIRATA, Katsuyuki SUGITA, Takahiro IMAI, Shinya OGAWA, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: 10372145
    Abstract: A pressure-type flow rate controller includes a body provided with a fluid passage which communicates a fluid inlet and a fluid outlet, a control valve for pressure control fixed to the body to open and close the fluid passage, an orifice arranged in the course of the fluid passage on the downstream side of the control valve, and a pressure sensor fixed to the body to detect the internal pressure of the fluid passage between the control valve and the orifice, wherein the fluid passage comprises a first passage portion communicating the control valve and a pressure detection chamber provided on a pressure detection surface of the pressure sensor, and a second passage portion spaced away from the first passage portion and communicating the pressure detection chamber and the orifice.
    Type: Grant
    Filed: November 25, 2014
    Date of Patent: August 6, 2019
    Assignee: Fujikin Incorporated
    Inventors: Takashi Hirose, Toshihide Yoshida, Atsushi Matsumoto, Kaoru Hirata, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Katsuyuki Sugita
  • Publication number: 20190227577
    Abstract: A pressure-type flow rate control device 1, while maintaining an upstream pressure P1 of an orifice 5 at approximately at least twice a downstream pressure P2, calculates a flow factor FF of a mixed gas consisting of two types of gases mixed at a mixture ratio of X:(1?X) by FF=(k/?){2/(?+1)}1/(??1)[?/{(?+1)R}]1/2 using an average density ?, an average specific heat ratio ?, and an average gas constant R of the mixed gas that are calculated by weighting the densities, specific heat ratios, and gas constants of the two types of gases at the mixture ratio, and calculates a flow rate Q of the mixed gas passing through the orifice by Q=FF·S·P1(1/T1)1/2, where S is the orifice cross section, and P1 and T1 are respectively the pressure and temperature of the mixed gas on the upstream side of the orifice.
    Type: Application
    Filed: August 24, 2017
    Publication date: July 25, 2019
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masaaki NAGASE, Kaoru HIRATA, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20190212176
    Abstract: A substrate processing system includes a gas supply unit having a first gas flow channel. A second gas flow channel of a flow rate measurement system is connected to the first gas flow channel. The flow rate measurement system further includes a third gas flow channel connected to the second gas flow channel, and a pressure sensor and a temperature sensor that measure a pressure and a temperature, respectively, in the third gas flow channel. In a method of an embodiment, a flow rate of a gas output from a flow rate controller of the gas supply unit is calculated using a build-up method. The flow rate of a gas is calculated without using the total volume of the first gas flow channel and the second gas flow channel and temperatures in the first gas flow channel and the second gas flow channel.
    Type: Application
    Filed: January 3, 2019
    Publication date: July 11, 2019
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Risako MIYOSHI, Norihiko AMIKURA, Kazuyuki MIURA, Masaaki NAGASE, Satoru YAMASHITA, Yohei SAWADA, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: D879248
    Type: Grant
    Filed: January 15, 2018
    Date of Patent: March 24, 2020
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kohei Shigyou, Takashi Hirose, Kouji Nishino, Ryousuke Dohi, Naofumi Yasumoto