Patents by Inventor Kouji Nishino

Kouji Nishino has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240094078
    Abstract: The pressure sensor 10 comprises: a bottomed cylindrical sensor module 11 having inside a pressure receiving chamber C1 communicating with a flow path and including a diaphragm 11a in contact with the pressure receiving chamber; a pressure detecting element 12 for outputting a strain of the diaphragm 11a as a pressure; a base ring 14 fixed at an outer edge of an open-side end part 11c of the sensor module and disposed on an outer peripheral side of the sensor module 11; a hermetic member 13 fixed to the base ring 14 for forming a sealed vacuum chamber C2 opposite to the pressure receiving chamber C1 across the diaphragm 11a; a gasket 18 sandwiched between the base ring 14 and a body 5; and a pressing flange 19 for pressing the base ring 14 to the body 5 through the gasket 18.
    Type: Application
    Filed: November 2, 2021
    Publication date: March 21, 2024
    Applicants: FUJIKIN INCORPORATED, NIDEC COPAL ELECTRONICS CORPORATION
    Inventors: Atsushi HIDAKA, Takatoshi NAKATANI, Kaoru HIRATA, Kouji NISHINO, Nobukazu IKEDA, Masaki FUKASAWA
  • Patent number: 11914407
    Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ?P between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.
    Type: Grant
    Filed: April 16, 2020
    Date of Patent: February 27, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kaoru Hirata, Keisuke Ideguchi, Shinya Ogawa, Katsuyuki Sugita, Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda, Hiroyuki Ito
  • Patent number: 11873916
    Abstract: A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.
    Type: Grant
    Filed: June 15, 2021
    Date of Patent: January 16, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masahiko Takimoto, Toshihide Yoshida, Tsutomu Shinohara, Kouji Nishino
  • Publication number: 20230400114
    Abstract: [Problem] The main purpose of the present invention is to provide a casing for a fluid controller capable of enabling maintenance inside the casing even in a state where the lower part of the casing is fixed to a main body of a fluid controller, and improving maintainability. [Solution] A casing 1 for covering devices 104,106,108 on a main body 101 of a fluid controller 100, the casing 1 is configured so as to be dividable into a plurality of parts, and the plurality of parts comprising a first part 2 provided with a fixing portion 2i for fixing to the main body 101, a second part 4 attached to the first part 2, and a third part 5 attachably and detachably provided at an upper partition higher than a predetermined height position of the casing 1.
    Type: Application
    Filed: October 18, 2021
    Publication date: December 14, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Takatoshi NAKATANI, Kazuyuki MORISAKI, Tomokazu HIROTA, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20230359228
    Abstract: A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.
    Type: Application
    Filed: July 3, 2023
    Publication date: November 9, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Katsuyuki SUGITA, Kouji NISHINO, Naofumi YASUMOTO, Kaoru HIRATA, Shinya OGAWA, Keisuke IDEGUCHI
  • Patent number: 11796458
    Abstract: A Concentration measurement device 100 comprises: a measurement cell 4 having a flow path through which a gas flows, a light source 1 for generating incident light to the measurement cell, a photodetector 7 for detecting light emitted from the measurement cell, a pressure sensor 20 for detecting a pressure of the gas in the measurement cell, a temperature sensor 22 for detecting a temperature of the gas in the measurement cell, and an arithmetic circuit 8 for calculating a concentration of the gas based on an output P of the pressure sensor, an output T of the temperature sensor, an output I of the photodetector, and an extinction coefficient ?, wherein the arithmetic circuit 8 is configured to calculate the concentration using the extinction coefficient ? determined on the basis of the output of the temperature sensor 22.
    Type: Grant
    Filed: January 21, 2020
    Date of Patent: October 24, 2023
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kazuteru Tanaka, Masahiko Takimoto, Kouji Nishino, Nobukazu Ikeda
  • Publication number: 20230324008
    Abstract: A gas supply system 100 comprises: a first vaporization supply device 10A including a first vaporization section 12A having a heater, a first valve 14A, and a first supply pressure sensor 16A for measuring a gas pressure between the first vaporization section and the first valve; a second vaporization supply device 10B including a second vaporization section 12B having a heater, a second valve 14B, and a second supply pressure sensor 16B for measuring a gas pressure between the second vaporization section and the second valve; and a control circuit 20. The system is configured to flow a gas from the first vaporization section 10A and a gas from the second vaporization section 10B sequentially into a common flow path, by shifting timings of an opening period of the first valve 14A and an opening period of the second valve 14B.
    Type: Application
    Filed: October 5, 2021
    Publication date: October 12, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Takatoshi NAKATANI, Atsushi HIDAKA, Kazuyuki MORISAKI, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: 11768123
    Abstract: A pressure sensor includes a cylindrical member configured to be attached to a body having a fluid passage, and a pressure sensor unit connected to the cylindrical member for detecting a pressure of a fluid flowing through the fluid passage, wherein the cylindrical member is made of a nickel-molybdenum-chromium alloy material or a stainless steel material, wherein the pressure sensor unit includes a sensor body closed at one end with a diaphragm and a pressure detecting element for outputting displacement of the diaphragm as pressure, and wherein the sensor body is made of a cobalt-nickel alloy material, and is connected at an opening side end portion to one end portion of the cylindrical member.
    Type: Grant
    Filed: October 2, 2019
    Date of Patent: September 26, 2023
    Assignee: FUJIKIN INCORPORATED
    Inventors: Atsushi Hidaka, Takatoshi Nakatani, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi
  • Publication number: 20230296464
    Abstract: A cover component 3 is used for a pressure sensor 1 that is fixed to a mounting surface 5S of a body 5 with a flow path F1 formed therein, and that has protrudes protruding from the mounting surface 5S, the cover component comprising a hollow member 3a having an inner peripheral surface facing a side surface of the protruding portion of the pressure sensor 1, and a cover member 3b fixed to the hollow member 3a and covering the protruding portion of the pressure sensor 1.
    Type: Application
    Filed: September 14, 2021
    Publication date: September 21, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Takatoshi NAKATANI, Tomokazu HIROTA, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: 11733721
    Abstract: A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.
    Type: Grant
    Filed: February 15, 2019
    Date of Patent: August 22, 2023
    Assignee: FUJIKIN INCORPORATED
    Inventors: Katsuyuki Sugita, Kouji Nishino, Naofumi Yasumoto, Kaoru Hirata, Shinya Ogawa, Keisuke Ideguchi
  • Publication number: 20230244251
    Abstract: A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.
    Type: Application
    Filed: June 15, 2021
    Publication date: August 3, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masahiko TAKIMOTO, Toshihide YOSHIDA, Tsutomu SHINOHARA, Kouji NISHINO
  • Patent number: 11692931
    Abstract: The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, optical fibers 11 and 12 for connecting the electric unit 20 and the fluid unit 10 and is configured to measure the concentration of the fluid in the measurement cell by detecting the light incident from the light source 22 to the measurement cell and then emitted from the measurement cell by the photodetector 24, where optical connection parts 32 and 34 connected to the optical fibers 11, 12 and the light source 22 or the photodetector 24 are integrally provided in the electric unit 20.
    Type: Grant
    Filed: March 31, 2020
    Date of Patent: July 4, 2023
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kazuteru Tanaka, Masahiko Takimoto, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 11686671
    Abstract: A concentration measurement device 100 includes a light source 22 for generating incident light to a measurement space 10A, a photodetector 24 for receiving light emitted from the measurement space, and an arithmetic control circuit 26 for calculating a concentration of a measurement fluid on the basis of an output of the photodetector, and the light source includes a first light-emitting element 22a for generating light having a first wavelength, and a second light-emitting element 22b for generating light having a second wavelength, and the concentration measurement device is configured so as to calculate the concentration using either light of the first wavelength or the second wavelength on the basis of the pressure or temperature of the measurement fluid.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: June 27, 2023
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Hidekazu Ishii, Kouji Nishino, Nobukazu Ikeda
  • Publication number: 20230152263
    Abstract: To provide a driving device including a piezoelectric element deterioration detection circuit and a deterioration detection method that enable detection of deterioration of the piezoelectric element used in the driving device, without stopping a normal operation of the driving device.
    Type: Application
    Filed: April 20, 2020
    Publication date: May 18, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Katsuyuki SUGITA, Takatoshi NAKATANI, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20230129479
    Abstract: A flow rate control device (8) includes a control valve (6) having a valve element and a piezoelectric element for moving the valve element, and an arithmetic processing circuit (7) for controlling an operation of the control valve, wherein the arithmetic processing circuit is configured to receive an external command signal SE corresponding to a target flow rate when opening the control valve from a closed state so that a gas flows at the target flow rate, and to generate an internal command signal E1 output to a driving circuit for determining a voltage applied to the piezoelectric element based on the external command signal, the internal command signal is a signal that rises with time from zero and converges to a value of the external command signal, and is generated such that a slope at the time of initial rise and a slope immediately before convergence are smaller than a slope therebetween.
    Type: Application
    Filed: January 19, 2021
    Publication date: April 27, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Katsuyuki SUGITA, Kouji NISHINO, Kaoru HIRATA, Shinya OGAWA, Keisuke IDEGUCHI
  • Publication number: 20230121563
    Abstract: A gas supply amount measurement method is performed in a gas supply system including a vaporization section, a control valve provided downstream of the vaporization section, and a supply pressure sensor for measuring the supply pressure between the vaporization section and the control valve. The method comprises: a step of measuring an initial supply pressure by the supply pressure sensor in a state where the control valve is closed; a step of opening the control valve for only a predetermined time; a step of measuring for a plurality of times of the supply pressure in a period of time between a time at which the pressure starts to fall from the initial supply pressure and a time at which a predetermined time has elapsed when the control valve is open for only a predetermined time, and a step of determining the gas supply amount when the control valve is open for only a predetermined time by calculation based on the measured values of the plurality of supply pressures.
    Type: Application
    Filed: March 18, 2021
    Publication date: April 20, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Takatoshi NAKATANI, Atsushi HIDAKA, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20230124208
    Abstract: A concentration measurement method performed in a concentration measurement device including an electric unit having a light source and a photodetector, a fluid unit having a measurement cell through which a gas flows, and a processing circuit for calculating a concentration of the gas based on an intensity of a light passing through the measurement cell. The concentration measurement method includes a step of determining an absorption coefficient of the measurement gas using a reference absorption coefficient determined in association with the reference gas and a correction factor associated with the measurement gas, and a step of obtaining a concentration of the measurement gas flowing in the measurement cell using the absorption coefficient of the measurement gas.
    Type: Application
    Filed: March 4, 2021
    Publication date: April 20, 2023
    Applicants: TOKUSHIMA UNIVERSITY, FUJIKIN INCORPORATED
    Inventors: Yoshihiro DEGUCHI, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: 11630058
    Abstract: A concentration measuring device 100 comprises: a measurement cell 4 having a flow path, a light source 1, a photodetector 7 for detecting light emitted from the measurement cell, and an arithmetic circuit 8 for calculating light absorbance and concentration of a fluid to be measured on the basis of an output of the photodetector, the measurement cell includes a cell body, a window portion 3 fixed to the cell body so as to contact the flow path, and a reflective member 5 for reflecting light incident on the measurement cell through the window portion, the window portion is fixed to the cell body 40 by a window holding member 30 via a gasket 15, an annular sealing protrusion 15a is provided on a first surface of the gasket for supporting the window portion, and an annular sealing protrusion 42a is also provided on a support surface 42 of the cell body for supporting the second surface opposite to the first surface of the gasket.
    Type: Grant
    Filed: June 10, 2022
    Date of Patent: April 18, 2023
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kazuteru Tanaka, Keiji Hirao, Tadayuki Yakushijin, Kouji Nishino, Michio Yamaji, Nobukazu Ikeda
  • Publication number: 20230021102
    Abstract: A flow rate control device 100 includes a flow rate control valve 8 having a valve element 8a and a piezoelectric element 8b for moving the valve element, and a control circuit 9 for controlling an operation of the flow rate control valve 8, wherein, in order to perform a pulsed fluid supply, the control circuit 9 is configured so as to open-loop control an applied voltage to the piezoelectric element so that it approaches the target voltage after once applying a voltage V1 exceeding a target voltage V0 corresponding to a target displacement of the piezoelectric element, when a pulsed flow rate setting signal is given.
    Type: Application
    Filed: December 3, 2020
    Publication date: January 19, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Katsuyuki SUGITA, Ryousuke DOHI, Koji KAWADA, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20230011244
    Abstract: A pressure control device 20 includes a pressure control valve 25, a flow resistance 23 provided downstream of the pressure control valve, for restricting a gas flow, a first pressure sensor 21 for measuring a gas pressure between the pressure control valve and the flow resistance, a second pressure sensor 22 for measuring a gas pressure downstream of the flow resistance, and an arithmetic control circuit 26 connected to the first pressure sensor and the second pressure sensor. The pressure control device is configured to control the gas pressure downstream of the flow resistance by adjusting an opening degree of the pressure control valve based on an output of the second pressure sensor regardless of an output of the first pressure sensor control, and calculate the flow rate of the gas downstream of the flow resistance based on the output of the first pressure sensor and the output of the second pressure sensor.
    Type: Application
    Filed: December 3, 2020
    Publication date: January 12, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kaoru HIRATA, Kouji NISHINO, Katsuyuki SUGITA, Shinya OGAWA, Keisuke IDEGUCHI