Abstract: A heat generation type flow sensor of an enhanced output sensitivity which is destined for use, for example, as an air flow sensor employed in an engine control system of a motor vehicle.

Abstract: A heat generation type flow sensor of an enhanced output sensitivity which is destined for use, for example, as an air flow sensor employed in an engine control system of a motor vehicle.

Abstract: A method of processing signal for a thermal type flow sensor having a temperature dependence resistance employing platinum and the like and a holding member made of alumina for holding it so as to compensate for response delay when fluid flow is changed, in which, when the fluid flow is maintained in a stationary state, the so-called equilibrium state, by steps of setting in advance the relation between a flow related value which changes according to flow change and a first operational value showing the temperature characteristic of the holding member which changes according to flow so as to make the flow related value as a parameter, calculating the first operational value from the flow related value when flow is detected in accordance with the predetermined relation, comparing the calculated first operational value with the second operational value which is set in relation with the first operational value, correcting the second operational value so that it approximates the first operational value according

Abstract: A method of processing a signal of a thermal flow-rate sensor, provides a temperature monitor for monitoring a temperature at a representative point on a substrate support member; obtains the temperature at the representative point corresponding to the flow rate by use of the temperature monitor; and corrects an output of the sensor in accordance with a value corresponding to the temperature as well as a value corresponding to the temperature at the representative point when the flow rate is in a steady state.