Patents by Inventor Koulin HU

Koulin HU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas mixture method and apparatus for generating ion beam
    Patent number: 9147550
    Abstract: A gas mixture method and apparatus of prolonging lifetime of an ion source for generating an ion beam particularly an ion beam containing carbon is proposed here. By mixing the dopant gas and the minor gas together to generate an ion beam, undesired reaction between the gas species and the ion source can be mitigated and thus lifetime of the ion source can be prolonged. Accordingly, quality of ion beam can be maintained.
    Type: Grant
    Filed: December 3, 2012
    Date of Patent: September 29, 2015
    Assignee: ADVANCED ION BEAM TECHNOLOGY, INC.
    Inventors: Wei-Cheng Lin, Zhimin Wan, Koulin Hu
  • Gas mixture method for generating ion beam
    Patent number: 8907301
    Abstract: A gas mixture method for generating an ion beam is provided here. By dynamically tuning the mixture ratio of the gas mixture, lifetime of the ion source of an ion implanter can be prolonged. Accordingly, quality of ion beam can be maintained and maintenance fee is reduced.
    Type: Grant
    Filed: September 4, 2013
    Date of Patent: December 9, 2014
    Assignee: Advanced Ion Beam Technology, Inc.
    Inventors: Koulin Hu, Zhimin Wan, Wei-Cheng Lin
  • GAS MIXTURE METHOD AND APPARATUS FOR GENERATING ION BEAM
    Publication number: 20140151572
    Abstract: A gas mixture method and apparatus of prolonging lifetime of an ion source for generating an ion beam particularly an ion beam containing carbon is proposed here. By mixing the dopant gas and the minor gas together to generate an ion beam, undesired reaction between the gas species and the ion source can be mitigated and thus lifetime of the ion source can be prolonged. Accordingly, quality of ion beam can be maintained.
    Type: Application
    Filed: December 3, 2012
    Publication date: June 5, 2014
    Applicant: ADVANCED ION BEAM TECHNOLOGY, INC.
    Inventors: Wei-Cheng LIN, Zhimin WAN, Koulin HU