Patents by Inventor Koumei Matsuzava

Koumei Matsuzava has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming a metal layer using an intermittent precursor gas flow process
    Patent number: 6924223
    Abstract: A method is provided for forming a metal layer on a substrate using an intermittent precursor gas flow process. The method includes exposing the substrate to a reducing gas while exposing the substrate to pulses of a metal-carbonyl precursor gas. The process is carried out until a metal layer with desired thickness is formed on the substrate. The metal layer can be formed on a substrate, or alternately, the metal layer can be formed on a metal nucleation layer.
    Type: Grant
    Filed: September 30, 2003
    Date of Patent: August 2, 2005
    Assignees: Tokyo Electron Limited, International Business Machines Corporation
    Inventors: Hideaki Yamasaki, Tsukasa Matsuda, Atsushi Gomi, Tatsuo Hatano, Mitsuhiro Tachibana, Koumei Matsuzava, Yumiko Kawano, Gert J Leusink, Fenton R McFeely, Sandra G. Malhotra, Andrew H Simon, John J Yurkas
  • Method of forming a metal layer using an intermittent precursor gas flow process
    Publication number: 20050069632
    Abstract: A method is provided for forming a metal layer on a substrate using an intermittent precursor gas flow process. The method includes exposing the substrate to a reducing gas while exposing the substrate to pulses of a metal-carbonyl precursor gas. The process is carried out until a metal layer with desired thickness is formed on the substrate. The metal layer can be formed on a substrate, or alternately, the metal layer can be formed on a metal nucleation layer.
    Type: Application
    Filed: September 30, 2003
    Publication date: March 31, 2005
    Applicants: Tokyo Electron Limited, International Business Machines Corporation
    Inventors: Hideaki Yamasaki, Tsukasa Matsuda, Atsushi Gomi, Tatsuo Hatano, Mitsuhiro Tachibana, Koumei Matsuzava, Yumiko Kawano, Gert Leusink, Fenton McFeely, Sandra Malhotra, Andrew Simon, John Yurkas