Abstract: A stacked-layer body including a gate insulating film and a control gate electrode is formed in a product region and a scribe region. Next, a gate insulating film and a conductive film are so formed that the stacked-layer body is covered. Next, an etching process is so performed to the conductive film that an upper surface of the conductive film is lower than that of an upper surface of the stacked-layer body, thereby forming a measurement pattern in the scribe region. Next, a memory gate electrode is formed by patterning the conductive film in the product region. Next, a silicide layer is formed on an upper surface of the memory gate electrode in the product region in a state where an upper surface of the measurement pattern is covered by an insulating film. Next, a resistance value of the measurement pattern covered by the insulating film is measured.

Abstract: A stacked-layer body including a gate insulating film and a control gate electrode is formed in a product region and a scribe region. Next, a gate insulating film and a conductive film are so formed that the stacked-layer body is covered. Next, an etching process is so performed to the conductive film that an upper surface of the conductive film is lower than that of an upper surface of the stacked-layer body, thereby forming a measurement pattern in the scribe region. Next, a memory gate electrode is formed by patterning the conductive film in the product region. Next, a silicide layer is formed on an upper surface of the memory gate electrode in the product region in a state where an upper surface of the measurement pattern is covered by an insulating film. Next, a resistance value of the measurement pattern covered by the insulating film is measured.