Patents by Inventor Kouta Tsutsumi

Kouta Tsutsumi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dielectric layer for electrostatic chuck and electrostatic chuck
    Patent number: 9120704
    Abstract: A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 108 to 1013 (?·cm) necessary for a Johnsen-Rahbek type electrostatic chuck.
    Type: Grant
    Filed: October 15, 2013
    Date of Patent: September 1, 2015
    Assignees: Nippon Tungsten Co., Ltd., Shinko Electric Industries Co., Ltd., Trek Holding Co., Ltd., Japan Fine Ceramics Center
    Inventors: Kouta Tsutsumi, Mitsuyoshi Nagano, Koki Tamagawa, Norio Shiraiwa, Tadayoshi Yoshikawa, Miki Saito, Toshio Uehara, Hideaki Matsubara, Tetsushi Matsuda
  • Composite ceramic body, and component member for semiconductor manufacturing apparatus
    Patent number: 9079800
    Abstract: A composite ceramic body which includes three phases consisting of a MgO phase, a YAP (YAlO3) phase and a spinel (MgAl2O4) phase. This composite ceramic body has a plasma resistance greater than that of alumina and approximately equal to that of MgO. Mechanical properties, such as hardness and bending strength, of the composite ceramic body, are approximately equal or superior to those of Al2O3. A raw material cost and a manufacturing cost thereof are lower than those of a rare-earth oxide. Further, electric conductive particles may be added thereto to lower an electrical resistivity. The composite ceramic body is suitably usable as component parts for a semiconductor manufacturing equipment.
    Type: Grant
    Filed: April 17, 2013
    Date of Patent: July 14, 2015
    Assignee: NIPPON TUNGSTEN CO., LTD
    Inventors: Kouta Tsutsumi, Ryou Matsuo, Mitsuyoshi Nagano
  • DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK
    Publication number: 20140103612
    Abstract: A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 108 to 1013 (?·cm) necessary for a Johnsen-Rahbek type electrostatic chuck.
    Type: Application
    Filed: October 15, 2013
    Publication date: April 17, 2014
    Applicants: NIPPON TUNGSTEN CO., LTD., JAPAN FINE CERAMICS CENTER, TREK HOLDING CO., LTD., SHINKO ELECTRIC INDUSTRIES CO., LTD.
    Inventors: Kouta Tsutsumi, Mitsuyoshi Nagano, Koki Tamagawa, Norio Shiraiwa, Tadayoshi Yoshikawa, Miki Saito, Toshio Uehara, Hideaki Matsubara, Tetsushi Matsuda