Patents by Inventor Koutaro Miyasaka

Koutaro Miyasaka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for managing polishing apparatus
    Publication number: 20050014373
    Abstract: A method for managing a polishing apparatus including downforce detecting means for detecting a downforce applied to a polishing target wafer, includes steps of: calculating a difference between a first downforce detected by the downforce detecting means at a first period at which the polishing apparatus stands by for polishing the wafer, and a second downforce detected by the downforce detecting means at a second period at which the polishing apparatus polishes the wafer, as an actual downforce actually applied to the wafer at the second period; and monitoring the actual downforce.
    Type: Application
    Filed: July 15, 2004
    Publication date: January 20, 2005
    Inventors: Koutaro Miyasaka, Shinichi Imai