Patents by Inventor Kouzo KAI

Kouzo KAI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PROCESSING APPARATUS USING SOURCE GAS AND REACTIVE GAS
    Publication number: 20090211526
    Abstract: The present invention relates to a processing apparatus for performing a film-deposition process or the like for an object to be processed (such as a semiconductor wafer) by means of a source gas and a reactive gas. The processing apparatus includes: a processing vessel (22) that contains therein an object to be processed (W); a source gas supply system (50) that selectively supplies a source gas into the processing vessel; a reactive gas supply system (52) that selectively supplies a reactive gas into the processing vessel; and a vacuum evacuating system (36) having vacuum pumps (44, 46), the system exhausting an atmosphere in the processing vessel to form a vacuum.
    Type: Application
    Filed: May 4, 2009
    Publication date: August 27, 2009
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Masayuki TANAKA, Kouzo KAI, Seishi MURAKAMI, Tetsuya MIYASHITA
  • Processing Apparatus Using Source Gas and Reactive Gas
    Publication number: 20070251452
    Abstract: The present invention relates to a processing apparatus for performing a film-deposition process or the like for an object to be processed (such as a semiconductor wafer) by means of a source gas and a reactive gas. The processing apparatus includes: a processing vessel (22) that contains therein an object to be processed (W); a source gas supply system (50) that selectively supplies a source gas into the processing vessel; a reactive gas supply system (52) that selectively supplies a reactive gas into the processing vessel; and a vacuum evacuating system (36) having vacuum pumps (44, 46), the system exhausting an atmosphere in the processing vessel to form a vacuum.
    Type: Application
    Filed: May 13, 2004
    Publication date: November 1, 2007
    Inventors: Masayuki Tanaka, Kouzo Kai, Seischi Murakami, Tetsuya Miyashita