Patents by Inventor Kouzou Terashima

Kouzou Terashima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Immersion-type apparatus for processing substrates
    Patent number: 5540247
    Abstract: A holding rod is disposed in a processing bath close to the bottom of the processing bath. The holding rod is located in a bottom center portion of the processing bath between two processing fluid supply pipes. Since the holding rod serves as diaphragm means, a processing fluid from outlet holes rushing toward the bottom center portion of the processing bath along the bottom of the processing bath hits the holding rod, changes its direction upward and starts uniformly circulating in the processing bath.
    Type: Grant
    Filed: December 5, 1994
    Date of Patent: July 30, 1996
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Masafumi Kawatani, Kouzou Terashima, Hazime Shirakawa