Abstract: Parts, especially those formed of quartz glass, for film-forming devices, plasma-treating devices and the like have a problem of inner pollution of the devices with particles given by dropping of deposit films from the parts, a problem of hermetical sealing reduction due to bonding failure of the parts to other parts, and a problem of energy efficiency reduction due to the heat insulation failure in the parts. Parts having a thermal sprayed quartz glass film formed on a substrate have an increased ability to hold a deposit thereon, and have an increased ability to hermetically bond to other parts. The parts having a thermal sprayed black quartz glass film have an increased ability of heat insulation property. Even when washed with acid, the abilities of the parts do not lower. The parts can be used for a long period of time and their life is long.

Abstract: In quartz glass parts and ceramic parts that are used in film-deposition devices and pre-cleaning devices in the production of semiconductors, etc., there are problems such as peeling off of the parts themselves during the use, peeling off of film-like substances adhered to the part surfaces, contamination of the products and short life time of the parts caused by corrosion of the part surfaces by plasma, and reduction in the productivity by frequent exchange of the parts. In quartz glass parts and ceramic parts that are used in film-deposition devices and pre-cleaning devices in the production of semiconductors, etc.

Abstract: [Problem]A surface-side reproduction type optical recording medium exhibiting high reliability in continuous tests of recording and being suitable for near field recording capable of obtaining good recording/reproducing characteristics is presented. [Means for solving the problem] The surface-side reproduction type optical recording medium carries out recording or reproducing with laser beams from an optical head having a numerical aperture NA of more than 1 wherein the optical head is floated from the surface of the medium at a height of &lgr;/4 or less where &lgr; is the wavelength of the laser beams, said optical recording medium comprising a substrate, and at least a recording layer and a transparent protective resin layer having a refractive index np of more than the NA formed on the substrate wherein the diameter of the laser beams on the medium surface is from 1.5 &mgr;m to 30 &mgr;m.

Abstract: A near field optical recording medium having a header area in which at least an addressing signal or a timing signal is recorded by means of a concave/convex pattern with laser light using a flying optical head. When a concave/convex portion of the concave/convex pattern is to be detected, either an effect due to a change in returning light caused by distance wherein the reflectance is changed or an effect due to a change in returning light caused by a diffraction effect is sufficiently larger, or a combination of such effects (changes by distance effect and changes by diffraction effect) are not weakened by each other, so that header information recorded by the concave/convex pattern can correctly be reproduced even in a super-high density recording medium using near field light.

Abstract: [Problem]A surface-side reproduction type optical recording medium exhibiting high reliability in continuous tests of recording and being suitable for near field recording capable of obtaining good recording/reproducing characteristics is presented.

Abstract: A magneto-optical recording medium and a reading method thereof are disclosed, in which the reading output is hardly reduced even in bits written at sufficiently narrower intervals than the optical diffraction limit of light for reading. The magneto-optical recording medium is that in an area the temperature of which has become not lower than a first predetermined temperature by radiation of a reading laser beam, a reading layer becomes a perpendicularly magnetized film, while recording marks in a recording layer are transferred to the reading layer, and these recording marks transferred to the reading layer are extended in the reading layer in an area the temperature of which has reached a second predetermined temperature or more.