Patents by Inventor Kozo Matuo

Kozo Matuo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming patterned silicone rubber layer
    Patent number: 4988403
    Abstract: The present invention provides a method of forming a patterned silicone rubber layer on a surface of a workpiece such as a silicone wafer. According to the method, a polyimide film is first formed on the workpiece surface, and subsequently etched by lithography in a predetermined pattern. Then, a silicone rubber layer is formed on the workpiece surface over the patterned polyimide film by spin coating, and thereafter etched by plasma etching until the patterned polyimide film is exposed. Finally, the remaining polyimide film alone is completely etched away, so that the pattern previously given to the polyimide film is copied to the silicone rubber layer in a negative fashion.
    Type: Grant
    Filed: December 19, 1989
    Date of Patent: January 29, 1991
    Assignee: Rohm Co., Ltd.
    Inventor: Kozo Matuo