Patents by Inventor Kozo Obara

Kozo Obara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma stabilizing apparatus employing feedback controls
    Patent number: 5365147
    Abstract: A plasma stabilizing apparatus having circuits for measuring electron temperature and electron density of a plasma using triple probes, a plasma gas pressure control circuit, and a plasma excitation power control circuit, for automatically stabilizing the plasma.
    Type: Grant
    Filed: July 27, 1992
    Date of Patent: November 15, 1994
    Assignees: Nichimen Kabushiki Kaisha, Nihon Kosyuha Kabushiki Kaisha
    Inventors: Kibatsu Shinohara, Kozo Obara, Tsuku Umezawa
  • Plasma diagnosing apparatus
    Patent number: 5359282
    Abstract: A plasma diagnosing apparatus for performing plasma diagnosis witch probes having a high degree of cleanliness by removing contamination caused by reactive plasma, etc., while quantitatively detecting a degree of the contamination of the probes. The disclosed apparatus avoids the disadvantages of conventional apparatuses, in which the voltage-current characteristics of the probes are deteriorated by growth of the contaminant film formed on the probes, making it difficult to measure the parameters of the plasma conditions.
    Type: Grant
    Filed: July 15, 1992
    Date of Patent: October 25, 1994
    Assignees: Nichimen Kabushiki Kaisha, Nihon Kosyuha Kabushiki Kaisha
    Inventors: Shinriki Teii, Kibatsu Shinohara, Kozo Obara, Tsuku Umezawa