Patents by Inventor Kr-Zu Su

Kr-Zu Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cooling system for semiconductor process
    Patent number: 5705822
    Abstract: A cooling system for use in a UV curing apparatus is disclosed. The cooling system includes a UV curing apparatus and a water supply element connected to the UV curing apparatus for cooling the curing apparatus via a first solenoid valve. A CPU is responsive to the UV curing apparatus for controlling the status of the first solenoid valve. An inverter is connected to the CPU and its output is coupled to a second solenoid valve. The second solenoid valve connects an air purging element to the curing apparatus. The air purging element provides clean dry air to force the water out of the curing apparatus.
    Type: Grant
    Filed: January 30, 1997
    Date of Patent: January 6, 1998
    Assignee: Vanguard International Semiconductor Corporation
    Inventor: Kr-Zu Su