Patents by Inventor Krag R. Senior

Krag R. Senior has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Linear accelerator assembly including flexible high-voltage connection
    Patent number: 12279359
    Abstract: Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, a LINAC may include a coil resonator and a plurality of drift tubes coupled to the coil resonator by a set of flexible leads.
    Type: Grant
    Filed: February 2, 2024
    Date of Patent: April 15, 2025
    Assignee: Applied Materials, Inc.
    Inventors: David T. Blahnik, Charles T. Carlson, Robert B. Vopat, Frank Sinclair, Paul J. Murphy, Krag R. Senior
  • METHOD OF ASSEMBLING DRIFT TUBE ASSEMBLIES IN ION IMPLANTORS
    Publication number: 20240420919
    Abstract: An ion implantation system including an ion source for generating an ion beam, an end station for holding a substrate to be implanted by the ion beam, and a linear accelerator disposed between the ion source and the end station and adapted to accelerate the ion beam, the linear accelerator comprising at least one acceleration stage including a resonator coil coupled to a drift tube assembly, the drift tube assembly including a first drift tube coupled to a first end of a first insulting rod via interference fit, a second drift tube coupled to a first end of a second insulting rod via interference fit, and a mounting bracket coupled to a second end of the first insulting rod and to a second end of the second insulting rod via interference fit.
    Type: Application
    Filed: June 15, 2023
    Publication date: December 19, 2024
    Applicant: Applied Materials, Inc.
    Inventors: Aaron P. WEBB, Krag R. SENIOR, Chris CZAJKA, Charles T. CARLSON, Jason M. SCHALLER
  • LINEAR ACCELERATOR ASSEMBLY INCLUDING FLEXIBLE HIGH-VOLTAGE CONNECTION
    Publication number: 20240179828
    Abstract: Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, a LINAC may include a coil resonator and a plurality of drift tubes coupled to the coil resonator by a set of flexible leads.
    Type: Application
    Filed: February 2, 2024
    Publication date: May 30, 2024
    Applicant: Applied Materials, Inc.
    Inventors: David T. BLAHNIK, Charles T. CARLSON, Robert B. VOPAT, Frank SINCLAIR, Paul J. MURPHY, Krag R. SENIOR
  • Linear accelerator assembly including flexible high-voltage connection
    Patent number: 11895766
    Abstract: Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, a LINAC may include a coil resonator and a plurality of drift tubes coupled to the coil resonator by a set of flexible leads.
    Type: Grant
    Filed: October 15, 2021
    Date of Patent: February 6, 2024
    Assignee: Applied Materials, Inc.
    Inventors: David T. Blahnik, Charles T. Carlson, Robert B. Vopat, Frank Sinclair, Paul J. Murphy, Krag R. Senior
  • LINEAR ACCELERATOR ASSEMBLY INCLUDING FLEXIBLE HIGH-VOLTAGE CONNECTION
    Publication number: 20230120769
    Abstract: Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, a LINAC may include a coil resonator and a plurality of drift tubes coupled to the coil resonator by a set of flexible leads.
    Type: Application
    Filed: October 15, 2021
    Publication date: April 20, 2023
    Applicant: Applied Materials, Inc.
    Inventors: David T. Blahnik, Charles T. Carlson, Robert B. Vopat, Frank Sinclair, Paul J. Murphy, Krag R. Senior
  • End effector pads
    Patent number: 9412638
    Abstract: An end effector pad including a fence member, a first recessed support member extending from a first side of the fence member, a second recessed support member extending from a second side of the fence member opposite the first side, a first glass plate having a relatively low coefficient of friction disposed on top of the first recessed support member for supporting a substrate thereon, and a second glass plate having a relatively low coefficient of friction disposed on top of the second recessed support member for supporting a substrate thereon.
    Type: Grant
    Filed: May 30, 2014
    Date of Patent: August 9, 2016
    Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Paul E. Pergande, Charles T. Carlson, Krag R. Senior
  • END EFFECTOR PADS
    Publication number: 20150279720
    Abstract: An end effector pad including a fence member, a first recessed support member extending from a first side of the fence member, a second recessed support member extending from a second side of the fence member opposite the first side, a first glass plate having a relatively low coefficient of friction disposed on top of the first recessed support member for supporting a substrate thereon, and a second glass plate having a relatively low coefficient of friction disposed on top of the second recessed support member for supporting a substrate thereon.
    Type: Application
    Filed: May 30, 2014
    Publication date: October 1, 2015
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Paul E. Pergande, Charles T. Carlson, Krag R. Senior