Patents by Inventor Kranthimitra Adusumilli

Kranthimitra Adusumilli has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for improvement of alignment and overlay for microlithography
    Patent number: 7535549
    Abstract: The present invention provides a method for determining the forces to be applied to a substrate in order to deform the same and correct for overlay misalignment.
    Type: Grant
    Filed: June 2, 2005
    Date of Patent: May 19, 2009
    Assignee: Board of Regents, University of Texas System
    Inventors: Anshuman Cherala, Sidlgata V. Sreenivasan, Kranthimitra Adusumilli
  • System and method for improvement of alignment and overlay for microlithography
    Publication number: 20050271955
    Abstract: The present invention provides a method for determining the forces to be applied to a substrate in order to deform the same and correct for overlay misalignment.
    Type: Application
    Filed: June 2, 2005
    Publication date: December 8, 2005
    Inventors: Anshuman Cherala, Sidlgata Sreenivasan, Kranthimitra Adusumilli