Patents by Inventor Krijn Frederik Bustraan
Krijn Frederik Bustraan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20230333488Abstract: A substrate holder to hold a substrate in a substrate holding position, the substrate holder including: a frame, multiple surface clamping devices arranged on the frame to clamp a substrate at an upper surface thereof, wherein the surface clamping devices each have a clamping pad to be arranged on the upper surface of the substrate, the surface clamping pads being movable with respect to each other at least in a first direction substantially perpendicular to the upper surface of a substrate held by the surface clamping pads, and one or more actuators to move the surface clamping pads with respect to each other in the first direction.Type: ApplicationFiled: August 20, 2021Publication date: October 19, 2023Applicant: ASML NETHERLANDS B.V.Inventors: Krijn Frederik BUSTRAAN, Arjan GIJSBERTSEN, Paul VAN DONGEN, Ibrahim ACAN
-
Patent number: 11421729Abstract: The invention relates to elastic guiding device to support a mass with respect to a base in a support direction, wherein the stiffness in support direction compared to stiffness in other direction, for example the stiffness in vertical direction compared to the stiffness in horizontal directions is substantially increased. The invention further relates to a positioning device comprising at least one elastic guiding device, and a lithographic apparatus comprising such positioning device.Type: GrantFiled: December 12, 2019Date of Patent: August 23, 2022Assignee: ASML Netherlands B.V.Inventors: Erwin Andreas Bernardus Mulder, Krijn Frederik Bustraan, Antonius Franciscus Johannes De Groot, Rinze Koolstra, Paul Peter Anna Antonius Brom
-
Publication number: 20220082126Abstract: The invention relates to elastic guiding device to support a mass with respect to a base in a support direction, wherein the stiffness in support direction compared to stiffness in other direction, for example the stiffness in vertical direction compared to the stiffness in horizontal directions is substantially increased. The invention further relates to a positioning device comprising at least one elastic guiding device, and a lithographic apparatus comprising such positioning device.Type: ApplicationFiled: December 12, 2019Publication date: March 17, 2022Applicant: ASML Netherlands B.V.Inventors: Erwin Andreas Bernardus MULDER, Krijn Frederik BUSTRAAN, Antonius Franciscus Johanne DE GROOT, Rinze KOOLSTRA, Paul Peter Anna Antoniu BROM
-
Patent number: 11003095Abstract: A positioning system for positioning an object. The positioning system includes a stage, a balance mass and an actuator system. The stage is for holding the object. The actuator system is arranged to drive the stage in a first direction while driving the balance mass in a second direction opposite to the first direction. The stage is moveable in the first direction in a movement range. When the stage is moving in the first direction and is at an end of the movement range, the positioning system is arranged to collide the stage frontally into the balance mass.Type: GrantFiled: August 31, 2017Date of Patent: May 11, 2021Assignees: ASML Netherlands B.V., ASML Holding N.V.Inventors: Krijn Frederik Bustraan, Yang-Shan Huang, Antonius Franciscus Johannes De Groot, Minkyu Kim, Jasper Anne Frido Marikus Simons, Theo Anjes Maria Ruijl, Ronald Josephus Maria Lamers
-
Patent number: 10630037Abstract: Disclosed is a high harmonic generation (HHG) radiation source which may be used to generate measurement radiation for an inspection apparatus. In such a radiation source, a pump radiation source is operable to emit pump radiation at a high harmonic generation gas medium thereby exciting the high harmonic generation gas medium within a pump radiation interaction region so as to generate the high harmonic radiation and an ionization radiation source is operable to emit ionization radiation at the high harmonic generation gas medium to ionize a gas at an ionization region between the pump radiation interaction region and an optical output of the illumination source.Type: GrantFiled: March 13, 2019Date of Patent: April 21, 2020Assignee: ASML Netherlands B.V.Inventors: Sudhir Srivastava, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Nan Lin, Sjoerd Nicolaas Lambertus Donders, Krijn Frederik Bustraan, Petrus Wilhelmus Smorenburg, Gerrit Jacobus Hendrik Brussaard
-
Patent number: 10530111Abstract: Disclosed is gas delivery system which is suitable for a high harmonic generation (HHG) radiation source which may be used to generate measurement radiation for an inspection apparatus. In such a radiation source, a gas delivery element delivers gas in a first direction. The gas delivery element has an optical input and an optical input, defining an optical path running in a second direction. The first direction is arranged relative to the second direction at an angle that is not perpendicular or parallel. Also disclosed is a gas delivery element having a gas jet shaping device, or a pair of gas delivery elements, one of which delivers a second gas, such that the gas jet shaping device or second gas is operable to modify a flow profile of the gas such that the number density of the gas falls sharply.Type: GrantFiled: February 23, 2018Date of Patent: January 7, 2020Assignee: ASML Netherlands B.V.Inventors: Sudhir Srivastava, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Nan Lin, Sjoerd Nicolaas Lambertus Donders, Krijn Frederik Bustraan, Petrus Wilhelmus Smorenburg, Gerrit Jacobus Hendrik Brussaard
-
Publication number: 20190219932Abstract: A positioning system for positioning an object. The positioning system includes a stage, a balance mass and an actuator system. The stage is for holding the object. The actuator system is arranged to drive the stage in a first direction while driving the balance mass in a second direction opposite to the first direction. The stage is moveable in the first direction in a movement range. When the stage is moving in the first direction and is at an end of the movement range, the positioning system is arranged to collide the stage frontally into the balance mass.Type: ApplicationFiled: August 31, 2017Publication date: July 18, 2019Applicant: ASML NETHERLANDS B.V.Inventors: Krijn Frederik BUSTRAAN, Yang-Shan HUANG, Antonius Franciscus Johannes DE GROOT, Minkyu KIM, Jasper Anne Frido Marikus SIMONS, Theo Anjes Maria RUIJL, Ronald Josephus Maria LAMERS
-
Publication number: 20190212657Abstract: Disclosed is a high harmonic generation (HHG) radiation source which may be used to generate measurement radiation for an inspection apparatus. In such a radiation source, a pump radiation source is operable to emit pump radiation at a high harmonic generation gas medium thereby exciting the high harmonic generation gas medium within a pump radiation interaction region so as to generate the high harmonic radiation and an ionization radiation source is operable to emit ionization radiation at the high harmonic generation gas medium to ionize a gas at an ionization region between the pump radiation interaction region and an optical output of the illumination source.Type: ApplicationFiled: March 13, 2019Publication date: July 11, 2019Applicant: ASML Netherlands B.V.Inventors: Sudhir SRIVASTAVA, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Nan Lin, Sjoerd Nicolaas Lambertus Donders, Krijn Frederik Bustraan, Petrus Wilhelmus Smorenburg, Gerrit Jacobus Hendrik Brussaard
-
Publication number: 20180267411Abstract: Disclosed is gas delivery system which is suitable for a high harmonic generation (HHG) radiation source which may be used to generate measurement radiation for an inspection apparatus. In such a radiation source, a gas delivery element delivers gas in a first direction. The gas delivery element has an optical input and an optical input, defining an optical path running in a second direction. The first direction is arranged relative to the second direction at an angle that is not perpendicular or parallel. Also disclosed is a gas delivery element having a gas jet shaping device, or a pair of gas delivery elements, one of which delivers a second gas, such that the gas jet shaping device or second gas is operable to modify a flow profile of the gas such that the number density of the gas falls sharply.Type: ApplicationFiled: February 23, 2018Publication date: September 20, 2018Applicant: ASML Netherlands B.V.Inventors: Sudhir SRIVASTAVA, Sander Bas ROOBOL, Simon Gijsbert Josephus MATHIJSSEN, Nan LIN, Sjoerd Nicolaas Lambertus DONDERS, Krijn Frederik BUSTRAAN, Petrus Wilhelmus SMORENBURG, Gerrit Jacobus Hendrik BRUSSAARD
-
Patent number: 9604025Abstract: A patient interface assembly includes a support member having a central support portion and a pair of cheek mount supports coupled to the central portion. Each cheek mount support applies a force on or on a side of a user's cheekbone. A seal member is coupled to the support portion and seals against the user. An additional nasal support member is provided that includes a first lateral side member operatively coupled to the central support portion and arranged to be disposed along a first side of a user's nose, and a second lateral side member also operatively coupled the central support portion and arranged to be disposed along a second side of a user's nose. At least a portion of the first lateral side member and the second lateral side member is rigid or semi rigid.Type: GrantFiled: April 17, 2012Date of Patent: March 28, 2017Assignee: KONINKLIJKE PHILIPS N.V.Inventors: Sander Theodoor Pastoor, Krijn Frederik Bustraan, Tom Jan Severijn, Adrianus Johannes Josephus Van Der Horst, Jerome Matula, Jr.
-
Publication number: 20150202397Abstract: The present invention relates to a patient interface assembly (10) and a force limiter (40). The force limiter (40) is adapted to limit a force between a patient interface (20) and a patient's face (14) when the patient interface (20) is applied to the patient (14). For this purpose, the force limiter (40) comprises a spring-like element (47, 48, 49, 49?, 49?, 49?, 1, 70) with a substantially degressive spring characteristic. The present invention further 5 relates to a patient interface, an attachment assembly and a clip for use in a patient interface assembly and comprising said force limiter.Type: ApplicationFiled: July 12, 2013Publication date: July 23, 2015Inventors: Sander Theodoor Pastoor, Peter Chi Fai Ho, Harmina Christina Zeijlstra, Krijn Frederik Bustraan
-
Publication number: 20150136138Abstract: A headgear assembly is disclosed for use in a patient interface assembly adapted to communicate a flow of gas with an airway of a patient comprising: at least a first headgear portion (9, 11) disposed during use on a first side of a patient's face in an area close to a first eye of the patient; a first stabilization member (2) operatively coupled to the first headgear portion so as to limit the movement of the headgear portion in a direction towards the first eye; and a patient interface assembly comprising such a headgear assembly.Type: ApplicationFiled: December 27, 2012Publication date: May 21, 2015Applicant: KONINKLIJKE PHILIPS N.V.Inventors: Sander Theodoor Pastoor, Krijn Frederik Bustraan, Timon Rutger Grob, Tom Jan Severijn
-
Patent number: 8836190Abstract: A magnetic bearing (108) with an axis of rotation (106), wherein the magnetic bearing comprises: a cylindrical rotor (116) comprising a ferromagnetic material (118, 338, 440) wherein the cylindrical rotor has an axis of symmetry (114), wherein the cylindrical rotor has an inner radius (124), wherein the cylindrical rotor has a top side (128), a static hub (120), wherein the static hub has an overhang (122) which protrudes from the static hub and is located adjacent to the top side, a lift magnetic actuator apparatus (130) for controlling the distance (126) between the top side and the overhang, a radial magnetic actuator apparatus (132) for controlling the distance (136) between the inner radius and the axis of rotation.Type: GrantFiled: April 14, 2010Date of Patent: September 16, 2014Assignee: Koninklijke Philips N.V.Inventors: Sahin Funda, Krijn Frederik Bustraan, Olav Seijger, Justus Bjorn Post
-
Publication number: 20140251340Abstract: A patient interface device is described for delivering a gas to a patient, the patient interface comprising a fastening means for fastening the patient interface to the user, the fastening means consisting of an element adapted for engaging the user's nose during use, wherein the fastening means is adapted for being fixed to said nose by exerting a pressure on said nose substantially in the width direction of said nose; and associated method.Type: ApplicationFiled: October 17, 2012Publication date: September 11, 2014Inventors: Sander Theodoor Pastoor, Krijn Frederik Bustraan, Timon Rutger Grob, Rudolf Maria Jozef Voncken
-
Publication number: 20120216812Abstract: A patient interface assembly includes a support member having a central support portion and a pair of cheek mount supports coupled to the central portion. Each cheek mount support applies a force on or on a side of a user's cheekbone. A seal member is coupled to the support portion and seals against the user. An additional nasal support member is provided that includes a first lateral side member operatively coupled to the central support portion and arranged to be disposed along a first side of a user's nose, and a second lateral side member also operatively coupled the central support portion and arranged to be disposed along a second side of a user's nose. At least a portion of the first lateral side member and the second lateral side member is rigid or semi rigid.Type: ApplicationFiled: April 17, 2012Publication date: August 30, 2012Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventors: SANDER THEODOOR PASTOOR, KRIJN FREDERIK BUSTRAAN, TOM JAN SEVERIJN, ADRIANUS JOHANNES JOSEPHUS VAN DER HORST, JEROME MATULA, JR.
-
Publication number: 20120038233Abstract: A magnetic bearing (108) with an axis of rotation (106), wherein the magnetic bearing comprises: a cylindrical rotor (116) comprising a ferromagnetic material (118, 338, 440) wherein the cylindrical rotor has an axis of symmetry (114), wherein the cylindrical rotor has an inner radius (124), wherein the cylindrical rotor has a top side (128), a static hub (120), wherein the static hub has an overhang (122) which protrudes from the static hub and is located adjacent to the top side, a lift magnetic actuator apparatus (130) for controlling the distance (126) between the top side and the overhang, a radial magnetic actuator apparatus (132) for controlling the distance (136) between the inner radius and the axis of rotation.Type: ApplicationFiled: April 14, 2010Publication date: February 16, 2012Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventors: Sahin Funda, Krijn Frederik Bustraan, Olav Seijger, Justus Bjorn Post
-
Patent number: 7667822Abstract: A lithographic apparatus includes a support constructed to support a patterning device. The patterning device is capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam. The support includes a force actuator device to exert a force onto the patterning device in a direction of movement of the support. The force actuator device includes a movable part which is pivotably about a pivot axis and thereby connected to the support. The movable part is in the direction of movement of the support substantially balanced with respect to the pivot axis. The force actuator device further includes an actuator to exert via the movable part the force onto the patterning device, to at least partly compensate for the information or a risk of slippage due to acceleration of the support in the direction of movement.Type: GrantFiled: February 14, 2006Date of Patent: February 23, 2010Assignee: ASML Netherlands B.V.Inventors: Fransicus Mathijs Jacobs, Erik Roelof Loopstra, Harmen Klaas Van der Schoot, Arjan Franklin Bakker, Arjan Martin Van der Wel, Krijn Frederik Bustraan, Marcel Koenraad Marie Baggen