Abstract: Methods and apparatus for depositing uniform boron-containing films are disclosed. A first precursor is delivered to a chamber through a first pathway having a first flow controller and a composition sensor. A second precursor is delivered by a second pathway, including a second flow controller, to a mixing point fluidly coupling the first and second pathways. A controller is coupled to the vibration sensor and the first and second flow controllers. The first precursor may be a mixture of diborane and a diluent gas, and the second precursor is typically a diluent gas. The flow rate of the first precursor may be set by determining a concentration of diborane in the first precursor from the composition sensor reading, and setting the flow rate to maintain a desired flow rate of diborane. The flow rate of the second precursor may be set to maintain a desired flow to the chamber.

Abstract: In general, the disclosure is directed to techniques for sensing the weight of a load object passing over a measurement surface. In some examples, a weigh-in motion (WIM) sensor is provided that includes a first beam that exhibits a linear elastance function, and a second beam that exhibits a nonlinear elastance function. In additional examples, the WIM sensor may include a measurement circuit configured to generate information corresponding to a weight of the load object, a wireless transmission circuit configured to transmit the information to a receiving station, and an energy harvesting circuit configured to harvest an amount of energy from vehicle vibrations. The energy harvested may be sufficient to power the wireless transmission circuit. In further examples, a WIM system is provided that includes a sequence of sensors. Information from the sequence of sensors may be used to remove noise in the raw data due to vehicle vibration.