Patents by Inventor Kristen Ikeda

Kristen Ikeda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FACTORY INTERFACE WITH REDUNDANCY
    Publication number: 20230054584
    Abstract: A substrate processing system for an electronic device manufacturing system can include a factory interface forming an interior volume, and a partition disposed in the factory interface. The partition can divide the interior volume into a first factory interface chamber forming a second interior volume, and a second factory interface chamber forming a third interior volume. The partition can be configured to provide a first sealed environment in the first factory interface chamber and a second sealed environment in the second factory interface chamber.
    Type: Application
    Filed: August 9, 2022
    Publication date: February 23, 2023
    Inventors: Paul Benjamin Reuter, Kristen Ikeda, Sushant S. Koshti, Jeffrey C. Hudgens