Abstract: A sensor device and a method of analyzing a component in a fluid are described. The sensor device comprises a planar substrate defining a substrate plane, an electromagnetic waveguide forming a waveguide resonator and extending in a length direction in a waveguide resonator plane parallel to the substrate plane, wherein the electromagnetic waveguide is supported on the substrate by a support structure, wherein the electromagnetic waveguide has a width in the waveguide resonator plane in a direction perpendicular to the length direction, and a height out of the waveguide plane in a direction perpendicular to the length direction.

Abstract: The present invention relates to a method for forming a 3D optical component comprising the steps of: forming over a substrate a liquid layer of a polymer in a solvent, drying said polymer for removing at least a portion of said solvent and thereby creating a layer having a first dissolution rate, exposing by multi-photon absorption using an electromagnetic radiation source a predefined volume of said layer, thereby causing the volume to have a second dissolution rate which is different to said first dissolution rate, dissolve the non-exposed areas with a liquid solution for forming the 3D optical component, wherein said polymer is Hydrogen silsesquioxane, HSQ, and said dried layer having a thickness of at least 1 ?m.

Abstract: In an embodiment a device includes a base layer, a support structure formed on the base layer, a side structure formed on the base layer and an elongated structure extending in a length direction in a device layer, wherein the elongated structure has a width in the device layer in a direction perpendicular to a length direction and a height in a direction out of the device layer and perpendicular to the length direction, wherein the elongated structure is delimited by two side surfaces and is supported on the support structure, and wherein at least a part of the side structure is arranged at a distance from the elongated structure in a width direction.

Abstract: In an embodiment a device includes a device layer, a substrate defining a substrate plane extending through a point of the substrate being closest to the device layer, a waveguide configured to guide an electromagnetic wave, wherein the waveguide extends in a length direction in the device layer, and wherein the waveguide has a width in a device layer plane in a direction perpendicular to the length direction and a height out of the device layer plane in the direction perpendicular to the length direction and a support structure, wherein the support structure extends from the substrate to the device layer to support the waveguide on the substrate.

Abstract: A sensor device comprising a planar substrate defining a substrate plane and a waveguide for guiding an electromagnetic wave. The waveguide extends in a length direction in a waveguide plane parallel to the substrate plane and has a width and a height wherein the width to height ratio is more than 5. The height of the waveguide is less than the wavelength of the electromagnetic wave. The waveguide is supported on the substrate by a support structure extending from the substrate to the waveguide, along the length direction of the waveguide, having a width which is smaller than the width of the waveguide. The invention further relates to a method of detecting a component in gas and a method of fabricating a sensor device.

Abstract: A sensor device comprising a planar substrate defining a substrate plane and a waveguide for guiding an electromagnetic wave. The waveguide extends in a length direction in a waveguide plane parallel to the substrate plane and has a width and a height wherein the width to height ratio is more than 5. The height of the waveguide is less than the wavelength of the electromagnetic wave. The waveguide is supported on the substrate by a support structure extending from the substrate to the waveguide, along the length direction of the waveguide, having a width which is smaller than the width of the waveguide. The invention further relates to a method of detecting a component in gas and a method of fabricating a sensor device.

Abstract: A sensor device comprising a planar substrate defining a substrate plane and a waveguide for guiding an electromagnetic wave. The waveguide extends in a length direction in a waveguide plane parallel to the substrate plane and has a width and a height, wherein the width to height ratio is more than 5. The height of the waveguide is less than the wavelength of the electromagnetic wave. The waveguide is supported on the substrate by a support structure extending from the substrate to the waveguide, along the length direction of the waveguide, having a width which is smaller than the width of the waveguide. The invention further relates to a method of detecting a component in gas and a method of fabricating a sensor device.

Abstract: The invention relates to a sensor device (1) comprising a planar substrate (3) defining a substrate plane (4) and a waveguide (2) for guiding an electromagnetic wave. The waveguide (2) extends in a length direction in a waveguide plane (4?) parallel to the substrate plane (4) and has a width (W, w) and a height (h) wherein the width (W, w) to height (h) ratio is more than 5. The height (h) of the waveguide (2) is less than the wavelength of the electromagnetic wave. The waveguide (2) is supported on the substrate (3) by a support structure (5) extending from the substrate (3) to the waveguide (2), along the length direction of the waveguide (2), having a width (Ws) which is smaller than the width (W, w) of the waveguide (2). The invention further relates to a method of detecting a component in gas and a method of fabricating a sensor device (1).