Patents by Inventor Kristof CUSTERS

Kristof CUSTERS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PELLICLE FRAME FOR EUV LITHOGRAPHY
    Publication number: 20230259019
    Abstract: A pellicle frame includes: a first portion; and a plurality of second portions. The first portion is for connection to a border of a pellicle. The first portion includes a hollow and generally rectangular body. The plurality of second portions are for connection to a patterning device. The first portion and the plurality of second portions are all formed from a first material. Each of the second portions is connected to the first portion by a spring portion formed from the first material. Such a pellicle frame is advantageous since the first portion, the plurality of second portions and the spring portions are all formed from a same material.
    Type: Application
    Filed: March 25, 2021
    Publication date: August 17, 2023
    Inventors: Kristof CUSTERS, Ron Geeraard Catharina DE BRUIJN, Matthias KRUIZINGA, Lodewijk Alexander SCHIJVENAARS