Patents by Inventor Kristoffer Gram KALHAUGE

Kristoffer Gram KALHAUGE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for measuring high resistivity test samples using voltages or resistances of spacings between contact probes
    Patent number: 11946890
    Abstract: To measure the resistance area product of a high resistivity layer using a microscopic multi point probe, the high resistivity layer is sandwiched between two conducting layers. A plurality of electrode configurations/positions is used to perform three voltage or resistance measurements. An equivalent electric circuit model/three layer model is used to determine the resistance area product as a function of the three measurements.
    Type: Grant
    Filed: May 12, 2022
    Date of Patent: April 2, 2024
    Assignee: KLA CORPORATION
    Inventors: Frederik Westergaard Osterberg, Kristoffer Gram Kalhauge, Mikkel Fougt Hansen
  • METHOD FOR MEASURING HIGH RESISTIVITY TEST SAMPLES
    Publication number: 20220373491
    Abstract: To measure the resistance area product of a high resistivity layer using a microscopic multi point probe, the high resistivity layer is sandwiched between two conducting layers. A plurality of electrode configurations/positions is used to perform three voltage or resistance measurements. An equivalent electric circuit model/three layer model is used to determine the resistance area product as a function of the three measurements.
    Type: Application
    Filed: May 12, 2022
    Publication date: November 24, 2022
    Inventors: Frederik Westergaard OSTERBERG, Kristoffer Gram KALHAUGE, Mikkel Fougt HANSEN