Abstract: This disclosure provides systems, methods and apparatus related to an ultrasonic sensor for detecting ultrasonic energy. In some implementations, the ultrasonic sensor includes a piezoelectric receiver layer bonded with an adhesive to an array of pixel circuits disposed on a substrate, each pixel circuit in the array including at least one thin film transistor (TFT) element and having a pixel input electrode electrically coupled to the pixel circuit. Methods of forming ultrasonic sensors include bonding piezoelectric receiver layers to TFT arrays.

Abstract: This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having one or more flexible support posts. In one aspect, the EMS device includes a substrate, a stationary electrode over the substrate, one or more flexible support posts over the substrate, and a movable electrode over the stationary electrode and supported by the one or more flexible support posts. The movable electrode is configured to move across a gap between the movable electrode and the stationary electrode upon electrostatic actuation, where the one or more flexible support posts include a first organic material and can be configured to compress to permit the movable electrode to move across the gap.

Abstract: This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having a non-electrically active absorber. In one aspect, the EMS device includes a stationary electrode over a substrate, a dielectric layer over the stationary electrode, an absorber over the dielectric layer, and a movable electrode over the absorber. The movable electrode is configured to move to a plurality of positions between the absorber and the movable electrode to define a plurality of gap heights. Furthermore, the absorber includes a non-electrically active material. In some implementations, the absorber can include an optical layer having a plurality of particles in an electrically insulating material.

Abstract: This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having one or more flexible support posts. In one aspect, the EMS device includes a substrate, a stationary electrode over the substrate, one or more flexible support posts over the substrate, and a movable electrode over the stationary electrode and supported by the one or more flexible support posts. The movable electrode is configured to move across a gap between the movable electrode and the stationary electrode upon electrostatic actuation, where the one or more flexible support posts include a first organic material and can be configured to compress to permit the movable electrode to move across the gap.

Abstract: This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device made of organic materials. In one aspect, the EMS device includes a stationary electrode over a substrate and a movable electrode over the stationary electrode, where the movable electrode is configured to move across a gap between the movable electrode and the stationary electrode by electrostatic actuation. One or more layers between the movable electrode and the stationary electrode may be made of polymer material. One or more layers in the EMS device may include an optical layer made of polymer material and configured to attenuate energy of light corresponding to one or more wavelength ranges. In some implementations, the optical layer may include a plurality of absorber particles in a host material that is electrically insulating.

Abstract: A touch sensor may include a digital resistive touch (DRT) sensor architecture that is substantially free of air gaps. The DRT touch sensor may include a layer of force-sensitive resistor (FSR) material on an array of row and column electrodes. The electrodes may be formed on a substantially transparent substrate. Near the intersection of each row and column, one or more thin transparent patterned conductive bridges may be situated above the FSR. The conductive bridges may be configured for electrical connection with row and column electrodes when force is applied to the conductive bridge or surface of the touch sensor. Some touch sensors may include both DRT and projected capacitive touch (PCT) functionality.

Abstract: This disclosure provides systems, methods and apparatus related to an ultrasonic sensor for detecting ultrasonic energy. In some implementations, the ultrasonic sensor includes a piezoelectric receiver layer bonded with an adhesive to an array of pixel circuits disposed on a substrate, each pixel circuit in the array including at least one thin film transistor (TFT) element and having a pixel input electrode electrically coupled to the pixel circuit. Methods of forming ultrasonic sensors include bonding piezoelectric receiver layers to TFT arrays.

Abstract: This disclosure provides systems, methods and apparatus for transparent conductive vias in a transparent substrate. In one aspect, a transparent conductive via extends through a transparent substrate and electrically connects a topside conductor on a top surface of the transparent substrate and a bottom side conductor on a bottom surface of the transparent substrate. In another aspect, a transparent conductive via extends at least partially through a transparent substrate and is in electrical communication with a topside conductor on a top surface of the transparent substrate. In another aspect, a method of forming a transparent through-substrate via is provided.

Abstract: A touch sensor may include a digital resistive touch (DRT) sensor architecture that is substantially free of air gaps. The DRT touch sensor may include a layer of force-sensitive resistor (FSR) material on an array of row and column electrodes. The electrodes may be formed on a substantially transparent substrate. Near the intersection of each row and column, one or more thin transparent patterned conductive bridges may be situated above the FSR. The conductive bridges may be configured for electrical connection with row and column electrodes when force is applied to the conductive bridge or surface of the touch sensor. Some touch sensors may include both DRT and projected capacitive touch (PCT) functionality.

Abstract: An interferometric modulator (“IMOD”) display utilizes ambient light and incorporates touch sensing without reducing the amount of ambient light that reaches the MEMS modulators, and without introducing any optical distortion or loss of performance. Electrodes for touch sensing are located at a back glass of the inteferometric display, and are used in conjunction with electrodes whose primary function is to activate the pixels of the MEMS display, in order to sense a touch. The touch deflects the IMOD layers and is sensed through the various display layers at the rear of the display.

Abstract: An interferometric modulator (“IMOD”) display utilizes ambient light and incorporates touch sensing without reducing the amount of ambient light that reaches the MEMS modulators, and without introducing any optical distortion or loss of performance. Electrodes for touch sensing are located at a back glass of the inteferometric display, and are used in conjunction with electrodes whose primary function is to activate the pixels of the MEMS display, in order to sense a touch. The touch deflects the IMOD layers and is sensed through the various display layers at the rear of the display.