Patents by Inventor Krysztof Szot

Krysztof Szot has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and Device for Structuring a Substrate
    Publication number: 20080318168
    Abstract: The invention relates to a method for structuring a substrate. According to said method, at least one mask with at least one opening is arranged over the substrate, and unmasked regions are modified in relation to masked regions of the substrate in order to form structures. The inventive method is characterised in that the representation of the mask opening on and/or in the substrate has smaller dimensions than those of the actual mask opening. The invention also relates to a device for carrying out said method.
    Type: Application
    Filed: July 27, 2005
    Publication date: December 25, 2008
    Inventors: Krysztof Szot, Frank Peter, Bernd Reichenberg