Abstract: The Near-field Optical Transmission Electron Emission Microscope involves the combination, in one instrument, of optical imaging in the near-field regime or close to it (in respect to the transmission electromagnetic radiation when the wavelength exceeds the desired lateral resolution) and the secondary electron imaging of EEM microscope (“Cathode lens objective” based Emission Electron Microscopy). These two microscopic techniques are combined by the application of the photon-electron converter, which converts the optical, transmission image of the object (illuminated by the penetrating electromagnetic radiation) to the correlated photoelectron image, by means of a matrix of one-way closed channels (capillaries). The closed, smooth front face of the converter (comprising channel-bottoms) remains in contact with the object of imaging, whereas its opposite, opened face (consisting of an array (matrix) of channel openings) is exposed to vacuum and emits the secondary electrons.

Abstract: The Near-field Optical Transmission Electron Emission Microscope involves the combination, in one instrument, of optical imaging in the near-field regime or close to it (in respect to the transmission electromagnetic radiation when the wavelength exceeds the desired lateral resolution) and the secondary electron imaging of EEM microscope (“Cathode lens objective” based Emission Electron Microscopy). These two microscopic techniques are combined by the application of the photon-electron converter, which converts the optical, transmission image of the object (illuminated by the penetrating electromagnetic radiation) to the correlated photoelectron image, by means of a matrix of one-way closed channels (capillaries). The closed, smooth front face of the converter (comprising channel-bottoms) remains in contact with the object of imaging, whereas its opposite, opened face (consisting of an array (matrix) of channel openings) is exposed to vacuum and emits the secondary electrons.

Abstract: An imaging energy filter for electrons and other charged particles filters an object formed by these particles at the filter inlet by means of an energetic selection of charged particles in the region of a dispersion aperture. The filter includes two concentric and spherical electrodes, which produce an electrostatic field that deflects the charged particles at an angle ? that is greater than ? and less than 2?. The deflector, operating as a deflecting element that generates a deflection field, is disposed at an intersection point of the inlet axis and the outlet axis and in a plane of symmetry of the angle ?, wherein the plane of symmetry simultaneously is an electro-optical plane. The deflection field generated by the deflecting element deflects the charged particles by an angle ???/2, leading to a total deflection angle of 2? and co-linearity of the inlet axis and outlet axis.

Abstract: An imaging energy filter for deflecting electrons and other charged particles filters an object formed by these particles at the filter inlet by means of an energetic selection of charged particles in the region of a dispersion screen. The filter includes two concentric and spherical electrodes, which produce an electrostatic field that deflects the charged particles at an angle ? that is greater than ? and less than 2?. The dispersion screen, operating as a deflecting element that generates a deflection field, is disposed at an intersection point of the inlet axis and the outlet axis and in a plane of symmetry of the angle ?, wherein the plane of symmetry simultaneously is an electro-optical plane. The deflection field generated by the deflecting element deflects the charged particles at an angle ?-?/2, leading to a total deflection angle of 2? and co-linearity of the inlet axis and outlet axis.

Abstract: In a SEM it is desirable, in given circumstances, to acquire an image of the sample (14) by means of Auger electrons extracted from the sample and traveling back through the bore of the objective lens (8) in the direction opposing the direction of the primary beam. It is know to separate extracted electrons from the primary beam by positioning Wien filters (32, 34) in front of the objective lens (8), the filters being energized in such a way that they do not cause deflection of the primary beam but do not deflect the secondary electrons. This technique cannot be used for Auger electrons, considering their high energy and hence much stronger fields in the Wien filters, thus causing substantial imaging aberrations in the primary beam.

Abstract: The invention relates to an emission electron microscope, comprising an objective lens, an imaging system with at least one lens and a stigmator. The invention is characterized in that said microscope comprises a second, independent imaging system (K2), parallel to the first imaging system (K1) and two electron detector devices (25) and (27), by means of which two independent images are recorded: a real image and an image of the angle distribution of the electrons as a result of electronically switching the potentials of the deflector elements (13) and (17). Both identical deflector elements comprise pairs of spherical and concentric electrodes and are electron-optically separated from each other (13a), (13b) and (17a), (17b) by double the focal length thereof and turn the electron beam through an angle corresponding to (&bgr;) and (−&bgr;), which leads to a parallel shift of the electron beam.