Patents by Inventor Kuan-Chang Chiu

Kuan-Chang Chiu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240387679
    Abstract: A semiconductor device and method of manufacture are provided. In some embodiments a treatment process is utilized to treat a work function layer. The treatment prevents excessive oxidation of the work function layer during subsequent processing steps, such as application of a subsequent photoresist material, thereby allowing the work function layer to be thinner than otherwise.
    Type: Application
    Filed: July 29, 2024
    Publication date: November 21, 2024
    Inventors: Chia-Ching Lee, Hung-Chin Chung, Chung-Chiang Wu, Hsuan-Yu Tung, Kuan-Chang Chiu, Chien-Hao Chen, Chi On Chui
  • Publication number: 20240363627
    Abstract: A structure includes a semiconductor substrate including a first semiconductor region and a second semiconductor region, a first transistor in the first semiconductor region, and a second transistor in the second semiconductor region. The first transistor includes a first gate dielectric over the first semiconductor region, a first work function layer over and contacting the first gate dielectric, and a first conductive region over the first work function layer. The second transistor includes a second gate dielectric over the second semiconductor region, a second work function layer over and contacting the second gate dielectric, wherein the first work function layer and the second work function layer have different work functions, and a second conductive region over the second work function layer.
    Type: Application
    Filed: July 9, 2024
    Publication date: October 31, 2024
    Inventors: Kuan-Chang Chiu, Chia-Ching Lee, Chien-Hao Chen, Hung-Chin Chung, Hsien-Ming Lee, Chi On Chui, Hsuan-Yu Tung, Chung-Chiang Wu
  • Patent number: 12087767
    Abstract: A structure includes a semiconductor substrate including a first semiconductor region and a second semiconductor region, a first transistor in the first semiconductor region, and a second transistor in the second semiconductor region. The first transistor includes a first gate dielectric over the first semiconductor region, a first work function layer over and contacting the first gate dielectric, and a first conductive region over the first work function layer. The second transistor includes a second gate dielectric over the second semiconductor region, a second work function layer over and contacting the second gate dielectric, wherein the first work function layer and the second work function layer have different work functions, and a second conductive region over the second work function layer.
    Type: Grant
    Filed: December 20, 2022
    Date of Patent: September 10, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuan-Chang Chiu, Chia-Ching Lee, Chien-Hao Chen, Hung-Chin Chung, Hsien-Ming Lee, Chi On Chui, Hsuan-Yu Tung, Chung-Chiang Wu
  • Publication number: 20230122022
    Abstract: A structure includes a semiconductor substrate including a first semiconductor region and a second semiconductor region, a first transistor in the first semiconductor region, and a second transistor in the second semiconductor region. The first transistor includes a first gate dielectric over the first semiconductor region, a first work function layer over and contacting the first gate dielectric, and a first conductive region over the first work function layer. The second transistor includes a second gate dielectric over the second semiconductor region, a second work function layer over and contacting the second gate dielectric, wherein the first work function layer and the second work function layer have different work functions, and a second conductive region over the second work function layer.
    Type: Application
    Filed: December 20, 2022
    Publication date: April 20, 2023
    Inventors: Kuan-Chang Chiu, Chia-Ching Lee, Chien-Hao Chen, Hung-Chin Chung, Hsien-Ming Lee, Chi On Chui, Hsuan-Yu Tung, Chung-Chiang Wu
  • Patent number: 11538805
    Abstract: A structure includes a semiconductor substrate including a first semiconductor region and a second semiconductor region, a first transistor in the first semiconductor region, and a second transistor in the second semiconductor region. The first transistor includes a first gate dielectric over the first semiconductor region, a first work function layer over and contacting the first gate dielectric, and a first conductive region over the first work function layer. The second transistor includes a second gate dielectric over the second semiconductor region, a second work function layer over and contacting the second gate dielectric, wherein the first work function layer and the second work function layer have different work functions, and a second conductive region over the second work function layer.
    Type: Grant
    Filed: November 4, 2020
    Date of Patent: December 27, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuan-Chang Chiu, Chia-Ching Lee, Chien-Hao Chen, Hung-Chin Chung, Hsien-Ming Lee, Chi On Chui, Hsuan-Yu Tung, Chung-Chiang Wu
  • Publication number: 20220336619
    Abstract: A semiconductor device and method of manufacture are provided. In some embodiments a treatment process is utilized to treat a work function layer. The treatment prevents excessive oxidation of the work function layer during subsequent processing steps, such as application of a subsequent photoresist material, thereby allowing the work function layer to be thinner than otherwise.
    Type: Application
    Filed: June 30, 2022
    Publication date: October 20, 2022
    Inventors: Chia-Ching Lee, Hung-Chin Chung, Chung-Chiang Wu, Hsuan-Yu Tung, Kuan-Chang Chiu, Chien-Hao Chen, Chi On Chui
  • Patent number: 11387344
    Abstract: A semiconductor device and method of manufacture are provided. In some embodiments a treatment process is utilized to treat a work function layer. The treatment prevents excessive oxidation of the work function layer during subsequent processing steps, such as application of a subsequent photoresist material, thereby allowing the work function layer to be thinner than otherwise.
    Type: Grant
    Filed: June 1, 2020
    Date of Patent: July 12, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Ching Lee, Hung-Chin Chung, Chung-Chiang Wu, Hsuan-Yu Tung, Kuan-Chang Chiu, Chien-Hao Chen, Chi On Chui
  • Publication number: 20210407995
    Abstract: A structure includes a semiconductor substrate including a first semiconductor region and a second semiconductor region, a first transistor in the first semiconductor region, and a second transistor in the second semiconductor region. The first transistor includes a first gate dielectric over the first semiconductor region, a first work function layer over and contacting the first gate dielectric, and a first conductive region over the first work function layer. The second transistor includes a second gate dielectric over the second semiconductor region, a second work function layer over and contacting the second gate dielectric, wherein the first work function layer and the second work function layer have different work functions, and a second conductive region over the second work function layer.
    Type: Application
    Filed: November 4, 2020
    Publication date: December 30, 2021
    Inventors: Kuan-Chang Chiu, Chia-Ching Lee, Chien-Hao Chen, Hung-Chin Chung, Hsien-Ming Lee, Chi On Chui, Hsuan-Yu Tung, Chung-Chiang Wu
  • Publication number: 20210273070
    Abstract: A semiconductor device and method of manufacture are provided. In some embodiments a treatment process is utilized to treat a work function layer. The treatment prevents excessive oxidation of the work function layer during subsequent processing steps, such as application of a subsequent photoresist material, thereby allowing the work function layer to be thinner than otherwise.
    Type: Application
    Filed: June 1, 2020
    Publication date: September 2, 2021
    Inventors: Chia-Ching Lee, Hung-Chin Chung, Chung-Chiang Wu, Hsuan-Yu Tung, Kuan-Chang Chiu, Chien-Hao Chen, Chi On Chui
  • Patent number: 10741707
    Abstract: Photodetectors and methods of forming the same include a first electrode. A carbon nanotube film is formed on the first electrode. A first graphene sheet is formed on the carbon nanotube film. A second graphene sheet is configured to exert an electrical field on the first graphene sheet that changes an electrical property of the first graphene sheet.
    Type: Grant
    Filed: March 23, 2018
    Date of Patent: August 11, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Abram L. Falk, Kuan-Chang Chiu, Damon B. Farmer, Shu-Jen Han
  • Publication number: 20190296158
    Abstract: Photodetectors and methods of forming the same include a first electrode. A carbon nanotube film is formed on the first electrode. A first graphene sheet is formed on the carbon nanotube film. A second graphene sheet is configured to exert an electrical field on the first graphene sheet that changes an electrical property of the first graphene sheet.
    Type: Application
    Filed: March 23, 2018
    Publication date: September 26, 2019
    Inventors: Abram L. Falk, Kuan-Chang Chiu, Damon B. Farmer, Shu-Jen Han