Abstract: Embodiments of the present disclosure generally relate to a system used in a semiconductor device manufacturing process. More specifically, embodiments provided herein generally include apparatus and methods for synchronizing and controlling the delivery of an RF bias signal and a pulsed voltage waveform to one or more electrodes within a plasma processing chamber. The apparatus and methods disclosed herein can be useful to at least minimize or eliminate a microloading effect created while processing small dimension features that have differing densities across various regions of a substrate. The plasma processing methods and apparatus described herein are configured to improve the control of various characteristics of the generated plasma and control an ion energy distribution (IED) of the plasma generated ions that interact with a surface of a substrate during plasma processing.

Abstract: An antenna alignment-monitoring method and an antenna alignment-monitoring system are provided. The antenna alignment-monitoring method includes the following steps. An alignment-monitoring system measures an antenna to obtain azimuth information, tilt information and roll information of the antenna. The azimuth information, the tilt information and the roll information are sent from the alignment-monitoring system to a portable device or a server. The azimuth information, the tilt information and the roll information are sent to the portable device and shown on a user interface for aligning the antenna. The azimuth information, the tilt information and the roll information are sent to the server for monitoring the antenna.

Abstract: An antenna alignment-monitoring method and an antenna alignment-monitoring system are provided. The antenna alignment-monitoring method includes the following steps. An alignment-monitoring system measures an antenna to obtain azimuth information, tilt information and roll information of the antenna. The azimuth information, the tilt information and the roll information are sent from the alignment-monitoring system to a portable device or a server. The azimuth information, the tilt information and the roll information are sent to the portable device and shown on a user interface for aligning the antenna. The azimuth information, the tilt information and the roll information are sent to the server for monitoring the antenna.

Abstract: A wireless transceiver comprises an antenna, a switch, a first receiver amplifier, a second receiver amplifier, a transmitter, a receiver, and a signal processor. The switch connects to the antenna and the transmitter respectively. The second receiver amplifier connects to the first receiver amplifier via the receiver. The signal processor connects to the first receiver amplifier and the second receiver amplifier respectively and controls working modes of the first receiver amplifier and the second receiver amplifier.