Patents by Inventor Kuan-Hao CHENG

Kuan-Hao CHENG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11916128
    Abstract: The present disclosure provides a method of forming a semiconductor device including an nFET structure and a pFET structure where each of the nFET and pFET structures include a semiconductor substrate and a gate trench. The method includes depositing an interfacial layer in each gate trench, depositing a first ferroelectric layer over the interfacial layer, removing the first ferroelectric layer from the nFET structure, depositing a metal oxide layer in each gate trench, depositing a second ferroelectric layer over the metal oxide layer, removing the second ferroelectric layer from the pFET structure, and depositing a gate electrode in each gate trench.
    Type: Grant
    Filed: February 27, 2023
    Date of Patent: February 27, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Min Cao, Pei-Yu Wang, Sai-Hooi Yeong, Ching-Wei Tsai, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20230378304
    Abstract: Multi-gate devices and methods for fabricating such are disclosed herein. An exemplary method includes forming a semiconductor stack on a substrate, wherein the semiconductor stack includes a first semiconductor layers and a second semiconductor layers alternatively disposed, the first semiconductor layers and the second semiconductor layers being different in composition; patterning the semiconductor stack to form a semiconductor fin; forming a dielectric fin next to the semiconductor fin; forming a first gate stack on the semiconductor fin and the dielectric fin; etching to a portion of the semiconductor fin within a source/drain region, resulting in a source/drain recess; and epitaxially growing a source/drain feature in the source/drain recess, defining an airgap spanning between a sidewall of the source/drain feature and a sidewall of the dielectric fin.
    Type: Application
    Filed: August 2, 2023
    Publication date: November 23, 2023
    Inventors: Po-Yu Lin, Wei-Yang Lee, Chia-Pin Lin, Tzu-Hua Chiu, Kuan-Hao Cheng, Wei-Han Fan, Yee-Chia Yeo, Wei Hao Lu
  • Publication number: 20230052084
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a first nanostructure stacked over and spaced apart from a second nanostructure, a gate stack wrapping around the first nanostructure and the second nanostructure, a source/drain feature adjoining the first nanostructure and the second nanostructure, and a first inner spacer layer interposing the gate stack and the source/drain feature and interposing the first nanostructure and the second nanostructure. A dopant in the source/drain feature has a first concentration at an interface between the first inner spacer layer and the source/drain feature and a second concentration at a first distance away from the interface. The first concentration is higher than the second concentration.
    Type: Application
    Filed: August 12, 2021
    Publication date: February 16, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuan-Hao CHENG, Wei-Yang LEE, Tzu-Hua CHIU, Wei-Han FAN, Po-Yu LIN, Chia-Pin LIN
  • Publication number: 20230018480
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate having a base and a fin over the base. The semiconductor device structure includes a gate stack over a top portion of the fin. The semiconductor device structure includes a first nanostructure over the fin and passing through the gate stack. The semiconductor device structure includes a second nanostructure over the first nanostructure and passing through the gate stack. The first nanostructure is thicker than the second nanostructure. The semiconductor device structure includes a stressor structure over the fin and connected to the first nanostructure and the second nanostructure.
    Type: Application
    Filed: July 16, 2021
    Publication date: January 19, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuan-Hao CHENG, Wei-Yang LEE, Tzu-Hua CHIU, Wei-Han FAN, Po-Yu LIN, Chia-Pin LIN
  • Publication number: 20230017036
    Abstract: A method of fabricating a device includes providing a fin having a stack of epitaxial layers including a plurality of semiconductor channel layers interposed by a plurality of dummy layers. A source/drain etch process is performed to remove portions of the stack of epitaxial layers in source/drain regions to form trenches that expose lateral surfaces of the stack of epitaxial layers. A dummy layer recess process is performed to laterally etch the plurality of dummy layers to form recesses along sidewalls of the trenches. An inner spacer material is deposited along sidewalls of the trenches and within the recesses. An inner spacer etch-back process is performed to remove the inner spacer material from the sidewalls of the trenches and to remove a portion of the inner spacer material from within the recesses to form inner spacers having a dish-like region along lateral surfaces of the inner spacers.
    Type: Application
    Filed: May 4, 2022
    Publication date: January 19, 2023
    Inventors: Wei-Han FAN, Chia-Pin LIN, Wei-Yang LEE, Tzu-Hua CHIU, Kuan-Hao CHENG, Po Shao LIN
  • Publication number: 20230018266
    Abstract: A semiconductor device and a method of forming the same are provided. In an embodiment, an exemplary semiconductor device includes a vertical stack of channel members disposed over a substrate, a gate structure wrapping around each channel member of the vertical stack of channel members, and a source/drain feature disposed over the substrate and coupled to the vertical stack of channel members. The source/drain feature is spaced apart from a sidewall of the gate structure by an air gap and a dielectric layer, and the air gap extends into the source/drain feature.
    Type: Application
    Filed: May 5, 2022
    Publication date: January 19, 2023
    Inventors: Wei-Han Fan, Chia-Pin Lin, Wei-Yang Lee, Tzu-Hua Chiu, Kuan-Hao Cheng, Po Shao Lin
  • Publication number: 20230019386
    Abstract: Semiconductor devices and methods are provided. In an embodiment, a semiconductor device includes first nanostructures directly over a first portion of a substrate and second nanostructures directly over a second portion of the substrate, n-type source/drain features coupled to the first nanostructures and p-type source/drain features coupled to the second nanostructures, and an isolation structure disposed between the first portion of the substrate and the second portion of the substrate. The isolation structure includes a first smiling region in direct contact with the first portion of the substrate and having a first height. The isolation structure also includes a second smiling region in direct contact with the second portion of the substrate and having a second height, the first height is greater than the second height.
    Type: Application
    Filed: May 24, 2022
    Publication date: January 19, 2023
    Inventors: Kuan-Hao Cheng, Chia-Pin Lin, Wei-Yang Lee, Tzu-Hua Chiu, Wei-Han Fan, Po-Yu Lin
  • Publication number: 20220320276
    Abstract: A semiconductor device includes a source/drain feature over a semiconductor substrate, channel layers over the semiconductor substrate and connected to the source/drain feature, a gate portion between vertically adjacent channel layers, and an inner spacer between the source/drain feature and the gate portion and between adjacent channel layers. The semiconductor device further includes an air gap between the inner spacer and the source/drain feature.
    Type: Application
    Filed: August 5, 2021
    Publication date: October 6, 2022
    Inventors: Po-Yu Lin, Wei-Yang Lee, Chia-Pin Lin, Tzu-Hua Chiu, Kuan-Hao Cheng, Wei-Han Fan, Li-Li Su, Wei-Min Liu
  • Publication number: 20220320307
    Abstract: Multi-gate devices and methods for fabricating such are disclosed herein. An exemplary method includes forming a semiconductor stack on a substrate, wherein the semiconductor stack includes a first semiconductor layers and a second semiconductor layers alternatively disposed, the first semiconductor layers and the second semiconductor layers being different in composition; patterning the semiconductor stack to form a semiconductor fin; forming a dielectric fin next to the semiconductor fin; forming a first gate stack on the semiconductor fin and the dielectric fin; etching to a portion of the semiconductor fin within a source/drain region, resulting in a source/drain recess; and epitaxially growing a source/drain feature in the source/drain recess, defining an airgap spanning between a sidewall of the source/drain feature and a sidewall of the dielectric fin.
    Type: Application
    Filed: September 1, 2021
    Publication date: October 6, 2022
    Inventors: Po-Yu Lin, Wei-Yang Lee, Chia-Pin Lin, Tzu-Hua Chiu, Kuan-Hao Cheng, Wei-Han Fan, Yee-Chia Yeo, Wei Hao Lu
  • Publication number: 20220162443
    Abstract: A thermoplastic polyurethane composition includes a first elastomer, a second elastomer, and a third elastomer. The first elastomer includes a first material and a plurality of fiber elements. The second elastomer includes a second material. The third elastomer includes a third material and an additive. Each of the first, second, and third materials is one of polyester-based thermoplastic polyurethane, polyether-based thermoplastic polyurethane, polycarbonate-based thermoplastic polyurethane, or combinations thereof. A golf ball and a method for making the golf ball are also provided herein.
    Type: Application
    Filed: November 25, 2020
    Publication date: May 26, 2022
    Inventors: Ping-Hsiu SHIH, Tsai-Shi LIU, Kuan-Hao CHENG, Liang-Ho TSAI