Abstract: The present application discloses an inertial sensor comprising a proof mass, an anchor, a flexible member and several sensing electrodes. The anchor is positioned on one side of the sensing, mass block in a first axis. The flexible member is connected to the anchor point and extends along the first axis towards the proof mass to connect the proof mass, in which the several sensing electrodes are provided. In this way, the present application can effectively solve the problems of high difficulty in the production and assembly of inertial sensors and poor product reliability thereof.

Abstract: The present application discloses an anchor structure for application to a microelectromechanical system device comprising a cap layer, a device layer and a substrate layer. Such an anchor structure enhances the stress tolerance of the microelectromechanical system device. The anchor structure comprises a first anchor portion, a second anchor portion and a flexible member located in the device layer. The first anchor portion and the second anchor portion are connected to two sides of the flexible member, respectively. The first anchor is secured to the cap layer by a first bonding portion, and the second anchor is secured to the substrate layer by a second bonding portion.

Abstract: An acoustic impedance measuring system configured to measure an acoustic impedance of an acoustic component includes a first chamber, a second chamber, a first sound pressure sensing device, a second sound pressure sensing device and a sound source. The first sound pressure sensing device is configured to sense a sound pressure in the first chamber. The second sound pressure sensing device is configured to sense a sound pressure in the second chamber. The sound source is connected to the first chamber, wherein the sound source generates a sound propagating towards a first cavity inside the first chamber. The acoustic component is disposed between the first chamber and the second chamber for being measured the acoustic impedance of the acoustic component, and the acoustic impedance of the acoustic component is measured by the first sound pressure sensing device and the second sound pressure sensing device.

Abstract: The present application discloses an inertial sensor comprising a proof mass, an anchor, a flexible member and several sensing electrodes. The anchor is positioned on one side of the sensing, mass block in a first axis. The flexible member is connected to the anchor point and extends along the first axis towards the proof mass to connect the proof mass, in which the several sensing electrodes are provided. In this way, the present application can effectively solve the problems of high difficulty in the production and assembly of inertial sensors and poor product reliability thereof.

Abstract: An event trigger and management system for providing automatic repeat requests (ARQs) by a single timer and a method thereof are provided. Various type timers for providing an ARQ are integrated into a single timer. Through a data structure of a timer node of automatic repeat requests time series, the automatic repeat request time series can be managed only by a single timer. Therefore, the efficiency of controlling and managing a timer associated with Worldwide Interoperability for Microwave Access (WiMAX) may be achieved.