Abstract: The present disclosure provides an extreme ultraviolet (EUV) lithography system including a radiation source and an EUV control system integrated with the radiation source. The EUV control system includes a 3-dimensional diagnostic module (3DDM) designed to collect a laser beam profile of a laser beam from the radiation source in a 3-dimensional (3D) mode, an analysis module designed to analyze the laser beam profile, a database designed to store the laser beam profile, and an EUV control module designed to adjust the radiation source. The analysis module is coupled with the database and the EUV control module. The database is coupled with the 3DDM and the analysis module. The EUV control module is coupled with the analysis module and the radiation source.

Abstract: An adjustable spanner includes a head containing a fixed jaw and a movable jaw; a slide is disposed at bottom of the fixed jaw, and an accommodation trough is disposed in the head; the movable jaw contains an insertion edge corresponding to the slide and tapered surface is disposed on bottom of the insertion edge; a locating member disposed in the accommodation trough of the head with an incline disposed on top of the locating member to contact the tapered surface of the insertion edge on the slide; and the movable jaw is secured at any location on the slide of the head by having both of the tapered surface of the movable jaw and the incline of the locating member to hold against each other.

Abstract: A high efficient magnetic energy shifting device includes at least a magnetism unit consisting of plural induction coils and at least a magnetic element. Each of the induction coils is provided with plural individual coils formed by having wire coaxially wound in a same direction, an opening formed in the center of the individual coils and an induction stage formed around the outer surface of the individual coils. The induction coils are successively arrayed and fixed stably by positioning elements. The magnetic element is located at a position corresponding to a maximal surface of the induction stage so as to create a high voltage in a same unit area or kinetic energy under a low current, achieving a purpose of high efficient energy shift.

Abstract: A fast adjustable spanner comprises a body of which an action side is provided with a protruding stationary jaw of which a bottom is formed with a glide path communicating with an accommodation slot provided in the body; a movable jaw provided with a sheath fringe corresponding to the glide path on which the adjustable jaw may transversally move, a tooth portion being provided at a bottom of the sheath fringe; a working part provided in the accommodation slot to lengthways move, a protruding joint portion being above the working part and having a screw; at least one elastic part between the working part and the accommodation slot, supporting the working part for wedging the screw to the tooth portion of adjustable jaw; thus, when being compressed with an external force, the elastic part is separate from the tooth portion of adjustable jaw for fast adjusting the movable jaw.

Abstract: A fast adjustable spanner comprises a body of which an action side is provided with a protruding stationary jaw of which a bottom is formed with a glide path communicating with an accommodation slot provided in the body; a movable jaw provided with a sheath fringe corresponding to the glide path on which the adjustable jaw may transversally move, a tooth portion being provided at a bottom of the sheath fringe; a working part provided in the accommodation slot to lengthways move, a protruding joint portion being above the working part and having a screw; at least one elastic part between the working part and the accommodation slot, supporting the working part for wedging the screw to the tooth portion of adjustable jaw; thus, when being compressed with an external force, the elastic part is separate from the tooth portion of adjustable jaw for fast adjusting the movable jaw.