Abstract: The present disclosure provides an extreme ultraviolet (EUV) lithography system including a radiation source and an EUV control system integrated with the radiation source. The EUV control system includes a 3-dimensional diagnostic module (3DDM) designed to collect a laser beam profile of a laser beam from the radiation source in a 3-dimensional (3D) mode, an analysis module designed to analyze the laser beam profile, a database designed to store the laser beam profile, and an EUV control module designed to adjust the radiation source. The analysis module is coupled with the database and the EUV control module. The database is coupled with the 3DDM and the analysis module. The EUV control module is coupled with the analysis module and the radiation source.

Abstract: A noise estimation apparatus for calculating a noise estimation value of a frame of an image is provided. The noise estimation apparatus includes a distribution calculation unit, a variance calculation unit, a distribution curve generation module and a noise estimation unit. The distribution calculation unit generates a pixel distribution according to multiple pixel data of an ith block of the frame and multiple previous pixel data of the ith block of a previous frame. The variance calculation unit combines the pixel data and the previous pixel data to generate a variance value. The curve distribution generation module generates a curve distribution according to the variance value, and compares the pixel distribution with the curve distribution to generate a weighting value. The noise estimation unit outputs the noise estimation value according to the weighting value and the variance value corresponding to each of the blocks of the frame.

Abstract: A noise estimation apparatus for calculating a noise estimation value of a frame of an image is provided. The noise estimation apparatus includes a distribution calculation unit, a variance calculation unit, a distribution curve generation module and a noise estimation unit. The distribution calculation unit generates a pixel distribution according to multiple pixel data of an ith block of the frame and multiple previous pixel data of the ith block of a previous frame. The variance calculation unit combines the pixel data and the previous pixel data to generate a variance value. The curve distribution generation module generates a curve distribution according to the variance value, and compares the pixel distribution with the curve distribution to generate a weighting value. The noise estimation unit outputs the noise estimation value according to the weighting value and the variance value corresponding to each of the blocks of the frame.

Abstract: A hologram is formed using a grating and a second hologram serving as an image hologram. The grating is constituted by a plurality of areas whose spatial frequencies and diffraction directions are different from each other. This grating is formed using a grating array and a mask. The second hologram has a plurality of areas each of which records information or image (e.g., ID data) serving as a recording target as an element hologram. The second hologram is formed using a Fresnel hologram serving as a first hologram. The first hologram can also be formed using a mask and a diffuser on which ID data is projected. On the hologram, information (pattern or image) is recorded with each of reference light components having different directions corresponding to the different small areas. Even if illumination light having a uniform wavefront is irradiated on this hologram, it is difficult to detect all the information (pattern and image).