Patents by Inventor Kuan-Luan Cheng

Kuan-Luan Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Overlay registration control system and method employing multiple pilot lot in-line overlay registration measurement
    Patent number: 6978191
    Abstract: A method for fabricating a microelectronic product and a system for fabricating the microelectronic product each employ an in-line automatic photolithographic processing and overlay registration measurement for a pair of pilot lots of a new product order, prior to in-line automatic processing of an additional new product order lot within a photolithographic process tool. The method and the system provide for efficient production of new product order lots, absent need for an independent pilot lot qualification method or system.
    Type: Grant
    Filed: September 6, 2003
    Date of Patent: December 20, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yo-Nien Lin, Kuan-Luan Cheng, Kun-Pi Cheng, Hsin-Yuan Chen
  • Overlay registration control system and method employing multiple pilot lot in-line overlay registration measurement
    Publication number: 20050055122
    Abstract: A method for fabricating a microelectronic product and a system for fabricating the microelectronic product each employ an in-line automatic photolithographic processing and overlay registration measurement for a pair of pilot lots of a new product order, prior to in-line automatic processing of an additional new product order lot within a photolithographic process tool. The method and the system provide for efficient production of new product order lots, absent need for an independent pilot lot qualification method or system.
    Type: Application
    Filed: September 6, 2003
    Publication date: March 10, 2005
    Inventors: To-Nien Lin, Kuan-Luan Cheng, Kun-Pi Cheng, Hsin-Yuan Chen