Patents by Inventor Kuan-Yu Chang

Kuan-Yu Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11948879
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The semiconductor device structure includes a device, a first dielectric material disposed over the device, and an opening is formed in the first dielectric material. The semiconductor device structure further includes a conductive structure disposed in the opening, and the conductive structure includes a first sidewall. The semiconductor device structure further includes a surrounding structure disposed in the opening, and the surrounding structure surrounds the first sidewall of the conductive structure. The surrounding structure includes a first spacer layer and a second spacer layer adjacent the first spacer layer. The first spacer layer is separated from the second spacer layer by an air gap.
    Type: Grant
    Filed: July 27, 2022
    Date of Patent: April 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Lin-Yu Huang, Li-Zhen Yu, Chia-Hao Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11929418
    Abstract: A gate structure includes a substrate divided into an N-type transistor region and a P-type transistor region. An interlayer dielectric covers the substrate. A first trench is embedded in the interlayer dielectric within the N-type transistor region. A first gate electrode having a bullet-shaped profile is disposed in the first trench. A gate dielectric contacts the first trench. An N-type work function layer is disposed between the gate dielectric layer and the first gate electrode. A second trench is embedded in the interlayer dielectric within the P-type transistor region. A second gate electrode having a first mushroom-shaped profile is disposed in the second trench. The gate dielectric layer contacts the second trench. The N-type work function layer is disposed between the gate dielectric layer and the second gate electrode. A first P-type work function layer is disposed between the gate dielectric layer and the N-type work function layer.
    Type: Grant
    Filed: November 11, 2021
    Date of Patent: March 12, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Jie-Ning Yang, Wen-Tsung Chang, Po-Wen Su, Kuan-Ying Lai, Bo-Yu Su, Chun-Mao Chiou, Yao-Jhan Wang
  • Patent number: 11139165
    Abstract: The disclosure describes a tunneling field effect transistor having an overlapping structure between the source and drain regions providing a greater tunneling area. The source or drain region may be a doped region in a semi-conductive substrate. The other source or drain region may be formed by epitaxial deposition over the doped region. The gate is formed over the epitaxial region where the doped and epitaxial regions overlap. The doped region may be formed in a fin structure with the epitaxial region and gate being formed on the top and sides of the fin.
    Type: Grant
    Filed: September 26, 2019
    Date of Patent: October 5, 2021
    Assignees: Taiwan Semiconductor Manufacturing Company, Ltd., National Chiao Tung University
    Inventors: Steve S. Chung, E. Ray Hsieh, Kuan-Yu Chang
  • Patent number: 11133183
    Abstract: The disclosure describes a tunneling field effect transistor having an overlapping structure between the source and drain regions providing a greater tunneling area. The source or drain region may be a doped region in a semi-conductive substrate. The other source or drain region may be formed by epitaxial deposition over the doped region. The gate is formed over the epitaxial region where the doped and epitaxial regions overlap. The doped region may be formed in a fin structure with the epitaxial region and gate being formed on the top and sides of the fin.
    Type: Grant
    Filed: October 7, 2019
    Date of Patent: September 28, 2021
    Assignees: Taiwan Semiconductor Manufacturing Company, Ltd., National Chiao Tung University
    Inventors: Steve S. Chung, E. Ray Hsieh, Kuan-Yu Chang
  • Patent number: 11133182
    Abstract: The disclosure describes a tunneling field effect transistor having an overlapping structure between the source and drain regions providing a greater tunneling area. The source or drain region may be a doped region in a semi-conductive substrate. The other source or drain region may be formed by epitaxial deposition over the doped region. The gate is formed over the epitaxial region where the doped and epitaxial regions overlap. The doped region may be formed in a fin structure with the epitaxial region and gate being formed on the top and sides of the fin.
    Type: Grant
    Filed: September 26, 2019
    Date of Patent: September 28, 2021
    Assignees: Taiwan Semiconductor Manufacturing Company, Ltd., National Chiao Tung University
    Inventors: Steve S. Chung, E. Ray Hsieh, Kuan-Yu Chang
  • Patent number: 11133184
    Abstract: The disclosure describes a tunneling field effect transistor having an overlapping structure between the source and drain regions providing a greater tunneling area. The source or drain region may be a doped region in a semi-conductive substrate. The other source or drain region may be formed by epitaxial deposition over the doped region. The gate is formed over the epitaxial region where the doped and epitaxial regions overlap. The doped region may be formed in a fin structure with the epitaxial region and gate being formed on the top and sides of the fin.
    Type: Grant
    Filed: October 7, 2019
    Date of Patent: September 28, 2021
    Assignees: Taiwan Semiconductor Manufacturing Company, Ltd., National Chiao Tung University
    Inventors: Steve S. Chung, E. Ray Hsieh, Kuan-Yu Chang
  • Publication number: 20200043726
    Abstract: The disclosure describes a tunneling field effect transistor having an overlapping structure between the source and drain regions providing a greater tunneling area. The source or drain region may be a doped region in a semi-conductive substrate. The other source or drain region may be formed by epitaxial deposition over the doped region. The gate is formed over the epitaxial region where the doped and epitaxial regions overlap. The doped region may be formed in a fin structure with the epitaxial region and gate being formed on the top and sides of the fin.
    Type: Application
    Filed: October 7, 2019
    Publication date: February 6, 2020
    Inventors: Steve S. Chung, E. Ray Hsieh, Kuan-Yu Chang
  • Publication number: 20200043727
    Abstract: The disclosure describes a tunneling field effect transistor having an overlapping structure between the source and drain regions providing a greater tunneling area. The source or drain region may be a doped region in a semi-conductive substrate. The other source or drain region may be formed by epitaxial deposition over the doped region. The gate is formed over the epitaxial region where the doped and epitaxial regions overlap. The doped region may be formed in a fin structure with the epitaxial region and gate being formed on the top and sides of the fin.
    Type: Application
    Filed: October 7, 2019
    Publication date: February 6, 2020
    Inventors: Steve S. Chung, E. Ray Hsieh, Kuan-Yu Chang
  • Publication number: 20200020525
    Abstract: The disclosure describes a tunneling field effect transistor having an overlapping structure between the source and drain regions providing a greater tunneling area. The source or drain region may be a doped region in a semi-conductive substrate. The other source or drain region may be formed by epitaxial deposition over the doped region. The gate is formed over the epitaxial region where the doped and epitaxial regions overlap. The doped region may be formed in a fin structure with the epitaxial region and gate being formed on the top and sides of the fin.
    Type: Application
    Filed: September 26, 2019
    Publication date: January 16, 2020
    Inventors: Steve S. Chung, E. Ray Hsieh, Kuan-Yu Chang
  • Publication number: 20200020526
    Abstract: The disclosure describes a tunneling field effect transistor having an overlapping structure between the source and drain regions providing a greater tunneling area. The source or drain region may be a doped region in a semi-conductive substrate. The other source or drain region may be formed by epitaxial deposition over the doped region. The gate is formed over the epitaxial region where the doped and epitaxial regions overlap. The doped region may be formed in a fin structure with the epitaxial region and gate being formed on the top and sides of the fin.
    Type: Application
    Filed: September 26, 2019
    Publication date: January 16, 2020
    Inventors: Steve S. Chung, E. Ray Hsieh, Kuan-Yu Chang
  • Patent number: 10504721
    Abstract: The disclosure describes a tunneling field effect transistor having an overlapping structure between the source and drain regions providing a greater tunneling area. The source or drain region may be a doped region in a semi-conductive substrate. The other source or drain region may be formed by epitaxial deposition over the doped region. The gate is formed over the epitaxial region where the doped and epitaxial regions overlap. The doped region may be formed in a fin structure with the epitaxial region and gate being formed on the top and sides of the fin.
    Type: Grant
    Filed: April 30, 2015
    Date of Patent: December 10, 2019
    Assignees: Taiwan Semiconductor Manufacturing Company, Ltd., National Chiao Tung University
    Inventors: Steve S. Chung, E. Ray Hsieh, Kuan-Yu Chang
  • Publication number: 20160322460
    Abstract: The disclosure describes a tunneling field effect transistor having an overlapping structure between the source and drain regions providing a greater tunneling area. The source or drain region may be a doped region in a semi-conductive substrate. The other source or drain region may be formed by epitaxial deposition over the doped region. The gate is formed over the epitaxial region where the doped and epitaxial regions overlap. The doped region may be formed in a fin structure with the epitaxial region and gate being formed on the top and sides of the fin.
    Type: Application
    Filed: April 30, 2015
    Publication date: November 3, 2016
    Inventors: Steve S. Chung, E. Ray Hsieh, Kuan-Yu Chang