Patents by Inventor Kuanf-Wen Liu

Kuanf-Wen Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES WITH IMPROVED METAL GATE FILL-IN FOR VERTICAL MEMORY CELL AND DEVICES THEREOF
    Publication number: 20170125259
    Abstract: Provided are improved semiconductor memory devices and methods for manufacturing such semiconductor memory devices. The methods may include two or more nitride removal steps during formation of gate layers in vertical memory cells. The two or more nitride removal steps may allow for wider gate layers increasing the gate fill-in, reducing the occurrence of voids, and thereby improving the word line resistance.
    Type: Application
    Filed: November 4, 2015
    Publication date: May 4, 2017
    Inventors: Jr-Meng WANG, Chih-Yuan WU, Kuanf-Wen LIU, Jung-Yi GUO, Chun-Min CHENG
  • Methods of manufacturing semiconductor devices with improved metal gate fill-in for vertical memory cell and devices thereof
    Patent number: 9627220
    Abstract: Provided are improved semiconductor memory devices and methods for manufacturing such semiconductor memory devices. The methods may include two or more nitride removal steps during formation of gate layers in vertical memory cells. The two or more nitride removal steps may allow for wider gate layers increasing the gate fill-in, reducing the occurrence of voids, and thereby improving the word line resistance.
    Type: Grant
    Filed: November 4, 2015
    Date of Patent: April 18, 2017
    Assignee: Macronix International Co., Ltd.
    Inventors: Jr-Meng Wang, Chih-Yuan Wu, Kuanf-Wen Liu, Jung-Yi Guo, Chun-Min Cheng