Abstract: In an embodiment, a system, includes: a first pressurized load port interfaced with a workstation body; a second pressurized load port interfaced with the workstation body; the workstation body maintained at a set pressure level, wherein the workstation body comprises an internal material handling system configured to move a semiconductor workpiece within the workstation body between the first and second pressurized load ports at the set pressure level; a first modular tool interfaced with the first pressurized load port, wherein the first modular tool is configured to process the semiconductor workpiece; and a second modular tool interfaced with the second pressurized load port, wherein the second modular tool is configured to inspect the semiconductor workpiece processed by the first modular tool.

Abstract: A reasoning system with a reasoning engine that uses a rule set created from a rule representation language that has an English/natural language-like rule syntax and format is discussed. The reasoning system employs a real-time selection algorithm that chooses the rules used to analyze complex data (e.g.: bio-medical research, e-commerce, Customer Relationship Management (CRM), environmental research & engineering, bio-chemical research and product development, Investment and money management, anything related to research and product development) without suffering exponential performance decreases as the complexity of the analysis increases. The use of the rule representation language enables different domain users to review, create and modify rules without requiring the users to possess an advanced knowledge of programming languages.