Patents by Inventor Kuang Ling Hsaio

Kuang Ling Hsaio has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Monitoring method, process and system for photoresist regeneration
    Patent number: 7052826
    Abstract: A monitoring method for photoresist regeneration, a process and a system for the same are provided. In the photoresist regeneration process of the invention, the solid content and viscosity of photoresist are adjusted by condensation under reduced pressure or dilution with photoresist thinner until the final solid content and viscosity reach the predetermined values thereof obtained through the quantification equation of the invention and then the waste photoresist is caused to pass through filters for removing pollution particles contained therein, such that the regenerated photoresist is acquired.
    Type: Grant
    Filed: August 16, 2004
    Date of Patent: May 30, 2006
    Assignee: Industrial Technology Research Institute
    Inventors: Ching Chin Lai, Fang Cheng Chang, Ming En Chen, Jung Hsiang Chu, Kuang Ling Hsaio, Yun Lin Jang