Abstract: The present invention provides an optical multi-axis linear displacement measurement system and a method thereof, and the system can detect the reflected light from the top surface of the object so as to obtain multi-axis linear displacements of the object. The optical multi-axis linear displacement measurement system utilizes a non-contact optical method for obtaining multi-axis linear displacements of the object and it can perform simultaneous multi-axis linear displacement measurements. The advantages of the system and method include: high response speed (bandwidth) for dynamic measurement, simple structure, cost effective, and high sensitivity for displacement measurements.

Abstract: The present invention provides an optical multi-axis linear displacement measurement system and a method thereof, and the system can detect the reflected light from the top surface of the object so as to obtain multi-axis linear displacements of the object. The optical multi-axis linear displacement measurement system utilizes a non-contact optical method for obtaining multi-axis linear displacements of the object and it can perform simultaneous multi-axis linear displacement measurements. The advantages of the system and method include: high response speed (bandwidth) for dynamic measurement, simple structure, cost effective, and high sensitivity for displacement measurements.

Abstract: The present invention provides a shear motion driven motion actuator. The motion actuator provides a plurality of driving modes to drive a main body, including the inertial drive mode, the friction drive mode and the scanning mode. The motion actuator comprises a base having a V-shape concave groove and a main body having a V-shape convex. A plurality of piezoelectric elements is provided on the base to drive the main body using the shearing deformation force of the piezoelectric elements. The present invention also provides motion control using a variety of driving modes to achieve stable, high resolution and linear driving of the main body along the base.

Abstract: A system for measurement of the height, angle and their variations of the surface of an object comprises a measurement module and an astigmatic optical path mechanism. The optical path mechanism makes a laser beam pass a lens assembly and focus on an object. The reflected light passes the lens assembly and an astigmatic lens, arriving at the photo sensor assembly, forming a light spot thereon. The translational displacements of the object are measured by the variations in shape of the light spot on the photo sensors. The angular displacements of the object are measured accordingly by the movement of the light spot on the photo sensors.

Abstract: The present invention provides a shear motion driven motion actuator. The motion actuator provides a plurality of driving modes to drive a main body, including the inertial drive mode, the friction drive mode and the scanning mode. The motion actuator comprises a base having a V-shape concave groove and a main body having a V-shape convex. A plurality of piezoelectric elements is provided on the base to drive the main body using the shearing deformation force of the piezoelectric elements. The present invention also provides motion control using a variety of driving modes to achieve stable, high resolution and linear driving of the main body along the base.