Patents by Inventor Kuanju FU

Kuanju FU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of detecting size of pattern formed by photolithography
    Patent number: 10788756
    Abstract: The present invention provides a method for detecting a size of a pattern made by photolithography, which being applied for detecting a size of a pattern formed on an array substrate of a liquid crystal display including: deriving function layer parameters and position parameters of a detection-pattern; deriving a thickness-profile of the detection-pattern according to the function layer parameters and the position parameters of the detection-pattern; deriving a plane-profile of the detection-pattern according to the thickness-profile of the detection-pattern; proceeding a size-detection to the plane-profile of the detection-pattern.
    Type: Grant
    Filed: August 18, 2015
    Date of Patent: September 29, 2020
    Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Kuanju Fu, Caiqin Chen, Zhonglai Wang
  • METHOD OF DETECTING SIZE OF PATTERN FORMED BY PHOTOLITHOGRAPHY
    Publication number: 20180239262
    Abstract: The present invention provides a method for detecting a size of a pattern made by photolithography, which being applied for detecting a size of a pattern formed on an array substrate of a liquid crystal display and made by, which comprises: deriving function layer parameters and position parameters of a detection-pattern; deriving a thickness-profile of the detection-pattern according to the function layer parameters and the position parameters of the detection-pattern; deriving a plane-profile of the detection-pattern according to the thickness-profile of the detection-pattern; proceeile of the detection-pattern.
    Type: Application
    Filed: August 18, 2015
    Publication date: August 23, 2018
    Inventors: Kuanju FU, Caiqin CHEN, Zhonglai WANG