Patents by Inventor Kui Baek

Kui Baek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Composition for cleaning semiconductor device and method for cleaning semiconductor device using the same
    Publication number: 20060234516
    Abstract: Provided are compositions for cleaning a semiconductor device that comprises (a) an inorganic acid in an amount ranging from 10 to 90 wt %, (b) a hydrofluoric acid compound in an amount ranging from 0.0001-1 wt %, (c) an additive in an amount ranging from 0-5 wt %, and (d) residual water to remove residuals of photoresist and metallic etching polymers which are generated in a dry etching process and an ashing process for manufacturing fine patterns of semiconductor device.
    Type: Application
    Filed: September 28, 2005
    Publication date: October 19, 2006
    Inventors: Eun Hong, Sang Ryu, Kang Shin, Kui Baek, Woong Hahn, Jung Lim, Sang Lee, Sung Kim, Hyun Kim