Abstract: Bake apparatus for use in baking a substrate, such as a semiconductor wafer, includes a chamber, a hot plate installed within the chamber, and first and second buffer plates for uniformly dispersing hot gas. The hot plate is configured to support the semiconductor wafer. The gas is injected into the chamber through an air passageway and is exhausted through an air exhaust opening. The first buffer plate is disposed within an upper part of the chamber so as to uniformly disperse the gas within the chamber. The second buffer plate is disposed above the first buffer plate. The first and second buffer plates each have a number of discharge holes by which the gas is uniformly discharged from the chamber to the exhaust opening.

Abstract: A method of biological treatment is developed for completely removing the compost remaining after decomposing the dissolved organic matter (COD) in wastewater by the bacteria or fungi.

Abstract: Bake apparatus for use in baking a substrate, such as a semiconductor wafer, includes a chamber, a hot plate installed within the chamber, and first and second buffer plates for uniformly dispersing hot gas. The hot plate is configured to support the semiconductor wafer. The gas is injected into the chamber through an air passageway and is exhausted through an air exhaust opening. The first buffer plate is disposed within an upper part of the chamber so as to uniformly disperse the gas within the chamber. The second buffer plate is disposed above the first buffer plate. The first and second buffer plates each have a number of discharge holes by which the gas is uniformly discharged from the chamber to the exhaust opening.

Abstract: A multistationed integrated life safety system in which each station will be situated at a diffferent location and have complete capabilities in terms of local fire protection, fire detection, control and/or monitoring and controlling the security of an area. Each station communicates with four adjacent stations so that when an event occurs at one station, that station is programmed to cause that information or that new status to be transmitted to each of the four adjacent stations. Thus, each station will be interconnected or networked to four other stations to provide multiple location control and annunciation so that each station may act independently.