Patents by Inventor Kumara Narasimha Sastry Kunigal

Kumara Narasimha Sastry Kunigal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230289509
    Abstract: Embodiments of the present disclosure relate to parallel mask rule checking on evolving mask shapes in optical proximity correction (OPC) flows for integrated circuit designs. Systems and methods are disclosed that perform mask (manufacturing) rule checks (MRC) in parallel, sharing information to maintain symmetry when violations are corrected. In an embodiment the shared information is also used to minimize changes to the geometric area of proposed mask shapes resulting from the OPC. In contrast to conventional systems, MRC is performed for multiple edges in parallel, sharing information between the different edges to encourage symmetry. In an embodiment, all edges may be adjusted in parallel to reduce mask-edge traversal bias.
    Type: Application
    Filed: March 11, 2022
    Publication date: September 14, 2023
    Inventors: Kumara Narasimha Sastry Kunigal, Saumyadip Mukhopadhyay, Kasyap Thottasserymana Vasudevan, Vivek Kumar Singh