Patents by Inventor Kumiko Higashi

Kumiko Higashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Rotary type apparatus for processing semiconductor wafers and method of processing semiconductor wafers
    Patent number: 5611861
    Abstract: The present invention provides a semiconductor wafer processing apparatus including (a) N process chambers for processing a semiconductor wafer therein wherein N is a positive integer greater than 1, the N process chambers being rotatably disposed in a circle having a first diameter and circumferentially equally spaced away from each other, (b) at least one pair of wafer transferring devices for transferring a semiconductor wafer into and taking a semiconductor wafer out of one of the N process chambers, the wafer transferring devices being disposed in a circle having a second diameter greater than the first diameter, the wafer transferring devices being circumferentially equally spaced away from each other at the same spacing as the N process chambers, and (c) a driver for rotating the N process chambers so that any two process chambers among the N process chambers face to the wafer transferring devices.
    Type: Grant
    Filed: May 31, 1996
    Date of Patent: March 18, 1997
    Assignee: NEC Corporation
    Inventor: Kumiko Higashi