Patents by Inventor Kumiko Ono
Kumiko Ono has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20220102160Abstract: An etching method includes: a physical adsorption process of physically adsorbing an adsorbate based on a first processing gas on a film to be etched under a condition that the pressure of the first processing gas is smaller than the saturated vapor pressure of the first processing gas with respect to a temperature of an object to be processed while cooling the object to be processed on which the film to be etched is formed; and an etching process of etching the film to be etched by reacting the adsorbate with the film to be etched by a plasma of a second processing gas.Type: ApplicationFiled: December 10, 2021Publication date: March 31, 2022Applicants: Tokyo Electron Limited, UNIVERSITE D'ORLEANSInventors: Shigeru TAHARA, Jacques FAGUET, Kaoru MAEKAWA, Kumiko ONO, Nagisa SATO, Remi DUSSART, Thomas TILLOCHER, Philippe LEFAUCHEUX, Gaëlle ANTOUN
-
Patent number: 11120999Abstract: A plasma etching method includes a physisorption step for causing an adsorbate that is based on first processing gas to be physisorbed onto a film to be etched, while cooling an object to be processed on which the film to be etched is provided; and an etching step for etching the film to be etched by causing the adsorbate to react with the film to be etched, using the plasma of second processing gas.Type: GrantFiled: December 11, 2018Date of Patent: September 14, 2021Assignees: TOKYO ELECTRON LIMITED, UNIVERSITE D'ORLEANSInventors: Koichi Yatsuda, Kaoru Maekawa, Nagisa Sato, Kumiko Ono, Shigeru Tahara, Jacques Faguet, Remi Dussart, Thomas Tillocher, Philippe Lefaucheux, Gaëlle Antoun
-
Patent number: 10861675Abstract: A controller disclosed herein drives, in a first step, a high frequency generating source at a first energy condition, and drives, in a second step, a high frequency generating source at a second energy condition. Prior to a switching time of the first step and the second step, the controller switches gas species supplied from the gas supply system into the processing container, and sets a gas flow rate in an initial period just after the switching to be larger than a gas flow rate in a stabilization period after lapse of the initial period.Type: GrantFiled: January 4, 2019Date of Patent: December 8, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Takao Funakubo, Hirofumi Haga, Shinichi Kozuka, Wataru Ozawa, Akihiro Sakamoto, Naoki Taniguchi, Hiroshi Tsujimoto, Kumiko Ono
-
Publication number: 20200381264Abstract: A plasma etching method includes a physisorption step for causing an adsorbate that is based on first processing gas to be physisorbed onto a film to be etched, while cooling an object to be processed on which the film to be etched is provided; and an etching step for etching the film to be etched by causing the adsorbate to react with the film to be etched, using the plasma of second processing gas.Type: ApplicationFiled: December 11, 2018Publication date: December 3, 2020Applicants: TOKYO ELECTRON LIMITED, UNIVERSITE D'ORLEANSInventors: Koichi YATSUDA, Kaoru MAEKAWA, Nagisa SATO, Kumiko ONO, Shigeru TAHARA, Jacques FAGUET, Remi DUSSART, Thomas TILLOCHER, Philippe LEFAUCHEUX, Gaëlle ANTOUN
-
Patent number: 10480978Abstract: A method according to an aspect includes outputting gas continuously from a flow rate controller, closing a valve, obtaining a first pressure rise characteristic, outputting the gas intermittently from the flow rate controller, closing the valve, obtaining a second pressure rise characteristic, obtaining a third pressure rise characteristic, obtaining a fourth pressure rise characteristic, obtaining a first required time required from the third pressure rise characteristic, obtaining a second required time from the fourth pressure rise characteristic, obtaining an estimated time until a predetermined pressure is reached, in a case where the intermittent output of the gas is performed assuming that there is no delay time, and obtaining a parameter representing a difference between the estimated time and the second required time.Type: GrantFiled: March 28, 2018Date of Patent: November 19, 2019Assignee: TOKYO ELECTRON LIMITEDInventors: Kumiko Ono, Hiroshi Tsujimoto
-
Publication number: 20190139744Abstract: A controller disclosed herein drives, in a first step, a high frequency generating source at a first energy condition, and drives, in a second step, a high frequency generating source at a second energy condition. Prior to a switching time of the first step and the second step, the controller switches gas species supplied from the gas supply system into the processing container, and sets a gas flow rate in an initial period just after the switching to be larger than a gas flow rate in a stabilization period after lapse of the initial period.Type: ApplicationFiled: January 4, 2019Publication date: May 9, 2019Applicant: TOKYO ELECTRON LIMITEDInventors: Takao FUNAKUBO, Hirofumi HAGA, Shinichi KOZUKA, Wataru OZAWA, Akihiro SAKAMOTO, Naoki TANIGUCHI, Hiroshi TSUJIMOTO, Kumiko ONO
-
Patent number: 10269539Abstract: In a plasma processing method includes a first stage of generating plasma of a first processing gas and a second stage of generating plasma of a second processing gas, are performed, a time difference between a start time point of a time period during which the second stage is performed and a start time point of an output of the second processing gas from a gas supply system is decided automatically according to a recipe. A delay time corresponding to flow rates of the first processing gas and the second processing gas in the second stage is specified from a function or a table.Type: GrantFiled: March 28, 2018Date of Patent: April 23, 2019Assignee: TOKYO ELECTRON LIMITEDInventors: Kumiko Ono, Hiroshi Tsujimoto, Koichi Nagami
-
Patent number: 10204763Abstract: A controller disclosed herein drives, in a first step, a high frequency generating source at a first energy condition, and drives, in a second step, a high frequency generating source at a second energy condition. Prior to a switching time of the first step and the second step, the controller switches gas species supplied from the gas supply system into the processing container, and sets a gas flow rate in an initial period just after the switching to be larger than a gas flow rate in a stabilization period after lapse of the initial period.Type: GrantFiled: June 26, 2015Date of Patent: February 12, 2019Assignee: TOKYO ELECTRON LIMITEDInventors: Takao Funakubo, Hirofumi Haga, Shinichi Kozuka, Wataru Ozawa, Akihiro Sakamoto, Naoki Taniguchi, Hiroshi Tsujimoto, Kumiko Ono
-
Publication number: 20180286721Abstract: A method according to an aspect includes outputting gas continuously from a flow rate controller, closing a valve, obtaining a first pressure rise characteristic, outputting the gas intermittently from the flow rate controller, closing the valve, obtaining a second pressure rise characteristic, obtaining a third pressure rise characteristic, obtaining a fourth pressure rise characteristic, obtaining a first required time required from the third pressure rise characteristic, obtaining a second required time from the fourth pressure rise characteristic, obtaining an estimated time until a predetermined pressure is reached, in a case where the intermittent output of the gas is performed assuming that there is no delay time, and obtaining a parameter representing a difference between the estimated time and the second required time.Type: ApplicationFiled: March 28, 2018Publication date: October 4, 2018Inventors: Kumiko ONO, Hiroshi TSUJIMOTO
-
Publication number: 20180218882Abstract: In a plasma processing method includes a first stage of generating plasma of a first processing gas and a second stage of generating plasma of a second processing gas, are performed, a time difference between a start time point of a time period during which the second stage is performed and a start time point of an output of the second processing gas from a gas supply system is decided automatically according to a recipe. A delay time corresponding to flow rates of the first processing gas and the second processing gas in the second stage is specified from a function or a table.Type: ApplicationFiled: March 28, 2018Publication date: August 2, 2018Inventors: Kumiko Ono, Hiroshi Tsujimoto, Koichi Nagami
-
Patent number: 9960016Abstract: In a plasma processing method in which multiple cycles, each of which includes a first stage of generating plasma of a first processing gas containing a first gas and a second stage of generating plasma of a second processing gas containing the first gas and a second gas, are performed, a time difference between a start time point of a time period during which the second stage is performed and a start time point of an output of the second gas from a gas supply system is decided automatically according to a recipe. A delay time corresponding to flow rates of the first gas and the second gas in the second stage is specified from a function or a table. The output of the second gas is begun prior to the start time point of the second stage by a time difference set based on the delay time.Type: GrantFiled: March 21, 2017Date of Patent: May 1, 2018Assignee: TOKYO ELECTRON LIMITEDInventors: Kumiko Ono, Hiroshi Tsujimoto, Koichi Nagami
-
Patent number: 9904299Abstract: A gas supply control method uses a pressure control flowmeter and first and second valves provided upstream and downstream, respectively, of the pressure control flowmeter in a gas supply line. The pressure control flowmeter includes a control valve and an orifice. The gas supply control method includes maintaining a pressure P1 of a first gas supply pipe between the orifice and the control valve and a pressure P2 of a second gas supply pipe between the orifice and the second valve so as to satisfy P1>2×P2. The supply of gas is controlled by controlling the opening and closing of the second valve with the first valve being open and the control valve being controlled. A volume V1 of the first gas supply pipe and a volume V2 of the second gas supply pipe have a relationship of V1/V2?9.Type: GrantFiled: March 25, 2016Date of Patent: February 27, 2018Assignee: Tokyo Electron LimitedInventors: Kumiko Ono, Hiroshi Tsujimoto, Atsushi Sawachi, Norihiko Amikura, Norikazu Sasaki, Yoshitaka Kawaguchi
-
Publication number: 20170278675Abstract: In a plasma processing method in which multiple cycles, each of which includes a first stage of generating plasma of a first processing gas containing a first gas and a second stage of generating plasma of a second processing gas containing the first gas and a second gas, are performed, a time difference between a start time point of a time period during which the second stage is performed and a start time point of an output of the second gas from a gas supply system is decided automatically according to a recipe. A delay time corresponding to flow rates of the first gas and the second gas in the second stage is specified from a function or a table. The output of the second gas is begun prior to the start time point of the second stage by a time difference set based on the delay time.Type: ApplicationFiled: March 21, 2017Publication date: September 28, 2017Inventors: Kumiko Ono, Hiroshi Tsujimoto, Koichi Nagami
-
Publication number: 20160299514Abstract: A gas supply control method uses a pressure control flowmeter and first and second valves provided upstream and downstream, respectively, of the pressure control flowmeter in a gas supply line. The pressure control flowmeter includes a control valve and an orifice. The gas supply control method includes maintaining a pressure P1 of a first gas supply pipe between the orifice and the control valve and a pressure P2 of a second gas supply pipe between the orifice and the second valve so as to satisfy P1>2×P2. The supply of gas is controlled by controlling the opening and closing of the second valve with the first valve being open and the control valve being controlled. A volume V1 of the first gas supply pipe and a volume V2 of the second gas supply pipe have a relationship of V1/V2?9.Type: ApplicationFiled: March 25, 2016Publication date: October 13, 2016Inventors: Kumiko ONO, Hiroshi TSUJIMOTO, Atsushi SAWACHI, Norihiko AMIKURA, Norikazu SASAKI, Yoshitaka KAWAGUCHI
-
Publication number: 20150380282Abstract: A controller disclosed herein drives, in a first step, a high frequency generating source at a first energy condition, and drives, in a second step, a high frequency generating source at a second energy condition. Prior to a switching time of the first step and the second step, the controller switches gas species supplied from the gas supply system into the processing container, and sets a gas flow rate in an initial period just after the switching to be larger than a gas flow rate in a stabilization period after lapse of the initial period.Type: ApplicationFiled: June 26, 2015Publication date: December 31, 2015Applicant: TOKYO ELECTRON LIMITEDInventors: Takao FUNAKUBO, Hirofumi HAGA, Shinichi KOZUKA, Wataru OZAWA, Akihiro SAKAMOTO, Naoki TANIGUCHI, Hiroshi TSUJIMOTO, Kumiko ONO
-
Publication number: 20090094692Abstract: A communication device, connected via a network so as to be able to communicate with a session control server, and which establishes a session with another communication device by performing signal transmission to and reception from the session control server, includes: a unit which generates an asymmetric key pair; a request unit which requests certificate issuance for a public key in the asymmetric key pair; a receiving unit which receives notification of public key issuance completion from the session control server; a storage unit which stores a public key certificate which has been received; a sending unit which sends a location registration request of a communication device to the session control server; and a receiving unit which receives a location registration completed notification which includes a term of validity from the session control server; and which sends a location registration request and a certificate issuance request as a combined request.Type: ApplicationFiled: October 3, 2008Publication date: April 9, 2009Applicant: NIPPON TELEGRAPH AND TELEPHONE CORPORATIONInventors: Kumiko Ono, Shinya Tachimoto, Seiichi Sakaya
-
Publication number: 20060047960Abstract: A communication device, connected via a network so as to be able to communicate with a session control server, and which establishes a session with another communication device by performing signal transmission to and reception from the session control server, includes: a unit which generates an asymmetric key pair; a request unit which requests certificate issuance for a public key in the asymmetric key pair; a receiving unit which receives notification of public key issuance completion from the session control server; a storage unit which stores a public key certificate which has been received; a sending unit which sends a location registration request of a communication device to the session control server; and a receiving unit which receives a location registration completed notification which includes a term of validity from the session control server; and which sends a location registration request and a certificate issuance request as a combined request.Type: ApplicationFiled: June 18, 2004Publication date: March 2, 2006Applicant: NIPPON TELEGRAPH AND TELEPHONE CORPORATIONInventors: Kumiko Ono, Shinya Tachimoto, Seiichi Sakaya
-
Patent number: 5039524Abstract: Disclosed are slow-release vermin-repellent microcapsules composed of a core substance and a wall film formed around the said core substance to encapsulate the same, in which the core substance is diethyltoluamide of a formula: ##STR1## and the wall film has a function of slow-releasability.Type: GrantFiled: August 2, 1988Date of Patent: August 13, 1991Assignees: Toppan Moore Company, Ltd., Showa Denko Kabushiki KaishaInventors: Ryuichi Oishi, Keiichi Utaka, Kumiko Ono, Michihiro Ohki, Toshirou Yasue