Patents by Inventor Kunho KIM

Kunho KIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas flow guiding device for semiconductor processing apparatus and method of using the same
    Patent number: 11004703
    Abstract: A semiconductor processing apparatus is disclosed, which comprises a chamber body having an interior volume, a substrate support pedestal disposed in the interior volume, a gas outlet member positioned above the substrate support pedestal inside the interior volume, having a plurality of dispense nozzles, and a gas guiding device positioned between the gas outlet member and the substrate support pedestal. The gas guiding device includes a plurality of petal elements pivotally arranged around the dispense nozzles of the gas outlet member and circumferentially overlapping one another, configured to dynamically adjust an output gas distribution over the substrate support pedestal.
    Type: Grant
    Filed: October 25, 2019
    Date of Patent: May 11, 2021
    Assignee: XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
    Inventors: Kunho Kim, Jinsun Choi
  • GAS FLOW GUIDING DEVICE FOR SEMICONDUCTOR PROCESSING APPARATUS AND METHOD OF USING THE SAME
    Publication number: 20210125846
    Abstract: A semiconductor processing apparatus is disclosed, which comprises a chamber body having an interior volume, a substrate support pedestal disposed in the interior volume, a gas outlet member positioned above the substrate support pedestal inside the interior volume, having a plurality of dispense nozzles, and a gas guiding device positioned between the gas outlet member and the substrate support pedestal. The gas guiding device includes a plurality of petal elements pivotally arranged around the dispense nozzles of the gas outlet member and circumferentially overlapping one another, configured to dynamically adjust an output gas distribution over the substrate support pedestal.
    Type: Application
    Filed: October 25, 2019
    Publication date: April 29, 2021
    Inventors: KUNHO KIM, JINSUN CHOI
  • Drive device for a roof module of a motor vehicle
    Patent number: 9056540
    Abstract: A drive device for a roof module of a motor vehicle. A drive device of this type, the roof module comprising two movable roof parts, with longitudinally extended tension/compression means for transmitting drive to the roof parts which are driveable by a common drive motor via two output pinions, is known. The output pinions are oriented coaxially with respect to each other, and the output pinions are assigned a change-over device which sets the drive motor into operative connection alternatively with the one or the other output pinion.
    Type: Grant
    Filed: June 27, 2014
    Date of Patent: June 16, 2015
    Assignee: BOS GMBH & CO. KG
    Inventors: Herbert Walter, Michael Heidan, Ulrich Mueller-Boysen, Tobias Waibel, Markus Singer, Han Joo Sung, Kunho Kim
  • DRIVE DEVICE FOR A ROOF MODULE OF A MOTOR VEHICLE
    Publication number: 20150001896
    Abstract: A drive device for a roof module of a motor vehicle. A drive device of this type, the roof module comprising two movable roof parts, with longitudinally extended tension/compression means for transmitting drive to the roof parts which are driveable by a common drive motor via two output pinions, is known. The output pinions are oriented coaxially with respect to each other, and the output pinions are assigned a change-over device which sets the drive motor into operative connection alternatively with the one or the other output pinion.
    Type: Application
    Filed: June 27, 2014
    Publication date: January 1, 2015
    Inventors: Herbert WALTER, Michael HEIDAN, Ulrich MUELLER-BOYSEN, Tobias WAIBEL, Markus SINGER, Han Joo SUNG, Kunho KIM