Patents by Inventor Kun-Hsiung SHIH

Kun-Hsiung SHIH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WAFER CLEANING WITH DYNAMIC CONTACTS
    Publication number: 20200058521
    Abstract: In an embodiment, a system includes: a pedestal configured to secure a wafer; a nozzle configured to deposit a cleaning solution on the wafer disposed on the pedestal during a cleaning session; and a plurality of contacts configured to secure the wafer to the pedestal while the cleaning solution is deposited on the wafer, wherein a first subset of the plurality of contacts is configured to contact the wafer at a first time interval and a second subset of the plurality of contacts is configured to contact the wafer at a second time interval.
    Type: Application
    Filed: August 13, 2019
    Publication date: February 20, 2020
    Inventors: Kun-Hsiung SHIH, Bo-Chen CHEN, Yung-Li TSAI, Chui-Ya PENG