Abstract: The present invention is related to micro-motion machine and micro-element fabricating machine using a 3-degree-of-freedom parallel mechanism. A micro-motion machine achieves a 3-degree-of-freedom micro movement by connecting two arms connected to prismatic flexible joints respectively, adapted to conduct vertical movements, by revolute flexible joints, and one arm connected to another prismatic flexible joint, adapted to conduct vertical movements by universal joint, to a platform by universal joint. This micro-motion machine has a relatively simple and inexpensive construction, high stiffness, and high accuracy, while exhibiting reduced inertia.