Patents by Inventor Kun-Woo Nam

Kun-Woo Nam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6576873
    Abstract: A semiconductor manufacturing apparatus for a photolithographic process having a coating process and a developing process is described, which includes a first port, a second port, a coating member, and a developing member. The first port and second port have a constant distance from each other, where a substrate comes in and goes out. The coating member, which couples the first port to the second port, carries the substrate between the first port and the second port and carries out the coating process. The developing member, which couples the first port to the second port and is opposite to the coating member, carries the substrate therebetween and carries out the developing process. The apparatus can stably maintain an operating ratio of equipment, and be installed in a relatively small area.
    Type: Grant
    Filed: October 19, 2000
    Date of Patent: June 10, 2003
    Assignee: DNS Korea Co., Ltd.
    Inventors: Jin-Young Choi, Kun-Woo Nam, Young-Koo Yeo